Fabrication of Al micro-belts by utilizing electromigration

被引：10

作者：

Lu, Yebo ^{[1
,2
]}

Saka, Masumi ^{[1
]}

机构：

[1] Tohoku Univ, Dept Nanomech, Aoba Ku, Sendai, Miyagi 9808579, Japan

[2] E China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai 200237, Peoples R China

来源：

MATERIALS LETTERS | 2009年 / 63卷 / 26期

关键词：

Electromigration; Micro-belts; Aluminum; Current stress; MICROSPHERES; INTEGRATION; NANOTUBES; WIRES;

D O I：

10.1016/j.matlet.2009.07.031

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The fabrication of electromigration induced micro-belts in passivated aluminum films was investigated. The experimental sample was a passivated polycrystalline Al line with a slit and a rectangular hole at the anode end. The micro-belts could be formed at predetermined positions, with their length dependent on the current stress time, and their widths and thicknesses controlled by the size of the hole. It was found that the growth of the micro-belt is affected by the purity of Al, the current density and the current stress time. The experimental results are explained in the discussion. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：2227 / 2229

页数：3

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