共 32 条
- [21] SANSEN W, 1984, P INT MICR C TOK JAP, P406
- [22] RESONANT DIAPHRAGM PRESSURE MEASUREMENT SYSTEM WITH ZNO ON SI EXCITATION [J]. SENSORS AND ACTUATORS, 1983, 4 (04): : 565 - 571
- [23] Stemme G., 1991, Journal of Micromechanics and Microengineering, V1, P113, DOI 10.1088/0960-1317/1/2/004
- [25] SILICON DIFFUSED-ELEMENT PIEZORESISTIVE DIAPHRAGMS [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (11) : 3322 - &
- [26] URA N, 1991, 10 SENS S, P41
- [27] VANSCHUYLENBERG.K, 1991, 1 EUR C BIOM ENG NIC, P194
- [28] WISE KD, 1991, 6TH INT C SOL STAT S, P2
- [30] WORTMANN J, IEEE T ELECTRON DEV, V16, P855