Effects of Edge Cracks on the Dynamics of Piezoelectric Cantilever Based MEMS Sensor

被引：0

作者：

Shoaib, Muhammad ^{[1
]}

Hamid, Nor Hisham ^{[1
]}

Jan, Mohammad Tariq ^{[1
]}

Ali, Noohul Basheer Zain ^{[1
]}

机构：

[1] Univ Teknol PETRONAS, Dept Elect & Elect Engn, Bandar Seri Iskandar 32610, Darul Ridzuan P, Malaysia

来源：

2016 6TH INTERNATIONAL CONFERENCE ON INTELLIGENT AND ADVANCED SYSTEMS (ICIAS) | 2016年

关键词：

MEMS; cantilever; analytical model; edge crack; frequency shift; Simulink; COMSOL; BREATHING CRACK;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

This paper presents edge crack fault modeling for piezoelectric cantilever based MEMS sensor using LTI (linear time invariant) technique. Frequency fault model is developed to analyze the dynamic behavior of the device in term of displacement, frequency and output electrical response. First an analytical model is developed that shows the electromechanical coupling of the device. Crack function along with the dynamic mass is used to develop the resonance frequency of cracked cantilever. Then LTI model of faulty device is developed by integrating the analytical equations using Simulink tool. The LTI model is validated by comparing its results with the FEM design using same design parameters using COMSOL tool. The results shows that resonance frequency of the device is changed by changing the crack size and its location in the cantilever structure.

引用

页数：6

共 16 条

[1]

[Anonymous], 2014, PLOS ONE, V9, P8

[2]

[Anonymous], FRACTURE MECH MODERN

[3] A model of a breathing crack with relaxation damping [J].