Deposition of Y thin films by nanosecond UV pulsed laser ablation for photocathode application

被引:7
作者
Lorusso, A. [1 ,2 ]
Anni, M. [1 ]
Caricato, A. P. [1 ,2 ]
Gontad, F. [1 ,2 ]
Perulli, A. [1 ]
Taurino, A. [3 ]
Perrone, A. [1 ,2 ]
Chiadroni, E. [4 ]
机构
[1] Univ Salento, Dipartimento Matemat & Fis E De Giorgi, I-73100 Lecce, Italy
[2] Ist Nazl Fis Nucl, I-73100 Lecce, Italy
[3] CNR, Inst Microelect & Microsyst, I-73100 Lecce, Italy
[4] Ist Nazl Fis Nucl, Lab Nazl Frascati, I-00044 Frascati, Italy
关键词
Pulsed laser deposition; Yttrium thin film deposition; Metallic photocathodes;
D O I
10.1016/j.tsf.2016.03.008
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work, yttrium (Y) thin films have been deposited on Si (100) substrates by the pulsed laser deposition technique. Ex-situ morphological, structural and optical characterisations of such films have been performed by scanning electron microscopy, X-ray diffractometry, atomic force microscopy and ellipsometry. Polycrystalline films with a thickness of 1.2 mu m, homogenous with a root mean square roughness of about 2 nm, were obtained by optimised laser irradiation conditions. Despite the relatively high thickness, the films resulted very adherent to the substrates. The high quality of such thin films is important to the synthesis of metallic photocathodes based on Y thin film, which could be used as electron sources of high photoemission performance in radio-frequency guns. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:441 / 445
页数:5
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