Preparation of (100) CeO2 and (110) YBa2Cu3O7-δ films by laser chemical vapor deposition

被引：7
作者：
Zhao, Pei [1 ]
Ito, Akihiko [1 ]
Goto, Takashi [1 ]
机构：
[1] Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
来源：
CERAMICS INTERNATIONAL | 2014年 / 40卷 / 01期
基金：
日本学术振兴会;
关键词：
Film; CeO2; Laser CVD; YBCO; Orientation control; BA-CU-O; THIN-FILMS; CERIUM DIOXIDE; GROWTH; CRYSTAL; Y1BA2CU3O7-X; MORPHOLOGY; SURFACES;
D O I：
10.1016/j.ceramint.2013.06.041
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
CeO2 and YBa2Cu3O7-delta (YBCO) films were prepared by laser chemical vapor deposition. The (100)-oriented CeO2 films prepared at 975-1088 K consisted of columnar grains with pyramidal caps of the CeO2 (111} planes. The deposition rate was 3.0-5.4 mu m h(-1). The (110)-oriented YBCO films were prepared on the (100)-oriented CeO2 films at a deposition temperature of 1004 K. The (110)-oriented YBCO films showed wedge-shaped grains. (C) 2013 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
引用
收藏
页码：605 / 609
页数：5
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