Effect of substrate annealing on the quality of pulsed laser deposited Zn1-xMgxO thin films

被引：7
|
作者：
Shukla, Gaurav [1 ]
Khare, Alika [1 ]
机构：
[1] Indian Inst Technol Guwahati, Laser & Photon Lab, Dept Phys, Gauhati 781039, India
来源：
APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 15期
关键词：
Thin films; Deposition; Epitaxial growth; SAPPHIRE SUBSTRATE; SURFACE; RECONSTRUCTION; REALIZATION; MGXZN1-XO; DETECTOR; EPITAXY; ALLOY; ZNO;
D O I：
10.1016/j.apsusc.2009.03.033
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The annealing effects of sapphire substrate before deposition on the quality of epitaxial Zn1-xMgxO thin films grown by pulsed laser deposition are reported. Our Experimental results indicate that the surface quality of Zn1-xMgxO thin films and hexagonal columnar growth is improved on the annealed sapphire substrate at high temperatures due to formation of atomic terraces on the substrate surface. The photoluminescence signals also increases with the increasing annealing temperature of the substrate. (c) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：7017 / 7020
页数：4
相关论文
共 50 条
  • [31] Effect of Mg content on structural, electrical and optical properties of Zn1-xMgxO nanocomposite thin films
    Kaushal, Ajay
    Kaur, Davinder
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2009, 93 (02) : 193 - 198
  • [32] Surface compositions of atomic layer deposited Zn1-xMgxO thin films studied using Auger electron spectroscopy
    Xie, Ting
    Romero, Danilo
    Gomez, Romel D.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2015, 33 (05):
  • [33] XRD studies on sol gel spin coating Zn1-xMgxO thin films
    Uma, Kasimayan
    Rusop, Mohamad
    Soga, Tetsuo
    Jimbo, Takashi
    TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN, VOL 30, NO 4, 2005, 30 (04): : 1251 - 1254
  • [34] Study on phase transition of Zn1-xMgxO thin films grown by MOCVD process
    Chiba, Yoshiyuki
    Meng, F. Y.
    Yamada, Akira
    Konagai, Makoto
    CONFERENCE RECORD OF THE 2006 IEEE 4TH WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION, VOLS 1 AND 2, 2006, : 567 - 570
  • [35] Structural, electrical and optical properties of transparent Zn1-xMgxO nanocomposite thin films
    Kaushal, Ajay
    Pathak, Dinesh
    Bedi, R. K.
    Kaur, Davinder
    THIN SOLID FILMS, 2009, 518 (05) : 1394 - 1398
  • [36] Influence of the aqueous solution composition on the morphology of Zn1-xMgxO films deposited by spray pyrolysis
    Winkler, Nina
    Wibowo, Rachmat Adhi
    Kautek, Wolfgang
    Dimopoulos, Theodoros
    JOURNAL OF MATERIALS CHEMISTRY C, 2019, 7 (13) : 3889 - 3900
  • [37] Substrate and annealing effects on the pulsed-laser deposited TiO2 thin films
    Hsu, LS
    Luca, D
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2003, 5 (04): : 841 - 847
  • [38] Effect of Substrate Temperature on Structural, Electrical and Optical Properties of Wurtzite and Cubic Zn1-XMgXO Thin Films Grown by Ultrasonic Spray Pyrolysis
    Kaushal, Ajay
    Kaur, Davinder
    TRANSPORT AND OPTICAL PROPERTIES OF NANOMATERIALS, 2009, 1147 : 339 - 346
  • [39] MOCVD growth and properties of ZnO and Zn1-xMgxO films
    Zheng, YD
    Gu, SL
    Ye, JD
    Liu, W
    Zhu, SM
    PROCEEDINGS OF THE SIXTH CHINESE OPTOELECTRONICS SYMPOSIUM, 2003, : 19 - 22
  • [40] Effect of annealing on the optical parameters in pulsed laser deposited vanadium pentoxide thin films
    Kumar, RTR
    Karunagaran, B
    Mangalaraj, D
    Narayandass, SK
    Manoravi, P
    Joseph, M
    COMPOUND SEMICONDUCTORS 2001, 2002, (170): : 629 - 634
12345