Absolute distance measurements using FTPSI with a widely tunable IR laser

被引:18
作者
Deck, LL [1 ]
机构
[1] Zygo Corp, Middletown, CT 06455 USA
来源
INTERFEROMETRY XI: APPLICATIONS | 2002年 / 4778卷
关键词
interferometry; laser radar; metrology; FTPSI;
D O I
10.1117/12.473544
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Fourier transform phase-shifting interferometry is further developed and applied to the absolute measurement of interferometer cavities. Using a widely tunable IR laser diode initially developed for telecom applications along with specific interferometer cavities, I apply this new capability to the measurement of absolute cavity lengths, where a 1-sigma precision of 12.6 ppb is demonstrated and the technique was then used to determinate the absolute index and thickness of a transparent parallel plate.
引用
收藏
页码:218 / 226
页数:9
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