Optical constants of hydrogenated zinc oxide thin films

被引：21

作者：

Al-Kuhaili, M. F. ^{[1
]}

Alade, I. O. ^{[1
]}

Durrani, S. M. A. ^{[1
]}

机构：

[1] King Fahd Univ Petr & Minerals, Dept Phys, Dhahran 31261, Saudi Arabia

来源：

OPTICAL MATERIALS EXPRESS | 2014年 / 4卷 / 11期

关键词：

DOPED ZNO FILMS; HIGH-CONDUCTIVITY; POSTTREATMENT; LUMINESCENCE; AMBIENT; H-2;

D O I：

10.1364/OME.4.002323

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Zinc oxide thin films were deposited via radio frequency magnetron sputtering. Hydrogenation of the films was achieved by annealing them at 400 degrees C under a hydrogen flow rate of 100 sccm. The influence of annealing on the structural, morphological, and optical properties of the films were investigated. X-ray diffraction indicated that the films were polycrystalline and that their crystallinity improved upon annealing. Atomic force microscopy revealed the columnar structure of the films and indicated that the surface roughness increased with annealing. The optical constants of the films were derived from spectrophotometric measurements. The optical properties were improved upon annealing, as revealed by the increase of the refractive index, decrease of the extinction coefficient, and the widening of the band gap. (C) 2014 Optical Society of America

引用

页码：2323 / 2331

页数：9

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