Non-destructive evaluation of semiconductor using laser SQUID microscope

被引：7
作者：
Kojima, Koichi [1 ]
Suda, Sachio [1 ]
Kong, Xiangyan [1 ]
Itozaki, Hideo [1 ]
机构：
[1] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
来源：
PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | 2006年 / 445卷 / 1-2期
关键词：
laser; squid; semiconductor testing; flux guide;
D O I：
10.1016/j.physc.2006.06.020
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A laser SQUID microscope has become a new tool for non-destructive evaluation of semiconductors. To improve the spatial resolution, a flux guide was introduced in the laser SQUID microscope. Using our laser SQUID microscope with and without the flux guide we have measured the magnetic field distribution in polycrystalline silicon solar cells with the same SQUID-sample distance. A laser beam induced current was used to generate the magnetic field. The solar cell was set at room temperature. Using the flux guide produces an image that is better resolved, with spatial resolution of about 50 mu m. The experiment has also been carried out with different laser wavelength. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：979 / 981
页数：3
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