Non-destructive evaluation of semiconductor using laser SQUID microscope

被引：7

作者：

Kojima, Koichi ^{[1
]}

Suda, Sachio ^{[1
]}

Kong, Xiangyan ^{[1
]}

Itozaki, Hideo ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan

来源：

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | 2006年 / 445卷 / 1-2期

关键词：

laser; squid; semiconductor testing; flux guide;

D O I：

10.1016/j.physc.2006.06.020

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A laser SQUID microscope has become a new tool for non-destructive evaluation of semiconductors. To improve the spatial resolution, a flux guide was introduced in the laser SQUID microscope. Using our laser SQUID microscope with and without the flux guide we have measured the magnetic field distribution in polycrystalline silicon solar cells with the same SQUID-sample distance. A laser beam induced current was used to generate the magnetic field. The solar cell was set at room temperature. Using the flux guide produces an image that is better resolved, with spatial resolution of about 50 mu m. The experiment has also been carried out with different laser wavelength. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：979 / 981

页数：3

共 13 条

[1] Magnetic detection of photogenerated currents in semiconductor wafers using superconducting quantum interference devices [J].

Beyer, J ;

Matz, H ;

Drung, D ;

Schurig, T .

APPLIED PHYSICS LETTERS, 1999, 74 (19) :2863-2865

[2] Noninvasive investigation of defects in multicrystalline silicon and photovoltaic devices by photomagnetic detection using superconducting quantum interference device magnetometers [J].

Beyer, J ;

Zhong, Q ;

Schurig, T .

APPLIED PHYSICS LETTERS, 2000, 77 (19) :3107-3109

[3] SQUID photoscanning: An imaging technique for NDE of semiconductor wafers and devices based on photomagnetic detection [J].

Beyer, J ;

Drung, D ;

Schurig, T .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2001, 11 (01) :1162-1167

[4] Non-contact evaluation of semiconductors using a laser SQUID microscope [J].

Daibo, M ;

Shikoda, A ;

Yoshizawa, M .

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2002, 372 :263-266

[5] Photo-induced magnetic field imaging of p-n junction using a laser SQUID microscope [J].

Daibo, M ;

Kotaka, T ;

Shikoda, A .

PHYSICA C, 2001, 357 (SUPPL. 1) :1483-1487

[6] Flux guide for high-Tc SQUID microscope with high spatial resolution [J].

Gudoshnikov, SA ;

Liubimov, BY ;

Matveets, LV ;

Mikhailenko, AP ;

Deryuzhkina, YV ;

Sitnov, YS ;

Snigirev, OV .

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2002, 368 (1-4) :66-69

[7] SQUID microscope for magnetic structure visualization in magnetoimpedance elements [J].

Gudoshnikov, SA ;

Rudenchik, PE ;

Matveets, LV ;

Snigirev, OV ;

Liubimov, BY ;

Perov, NS ;

Gan'shina, EA ;

Antonov, AS ;

D'achkov, AL ;

Sedova, MV .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2001, 11 (01) :223-225

[8] Scanning squid microscopy [J].

Kirtley, JR ;

Wikswo, JP .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1999, 29 :117-148

[9] Design and applications of a scanning SQUID microscope [J].

Kirtley, JR ;

Ketchen, MB ;

Tsuei, CC ;

Sun, JZ ;

Gallagher, WJ ;

YuJahnes, LS ;

Gupta, A ;

Stawiasz, KG ;

Wind, SJ .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1995, 39 (06) :655-668

[10] Magnetic flux guide for HTS SQUID microscope [J].

Kondo, T ;

Itozaki, H .

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2003, 392 :1401-1405

← 1 2 →