Pulse-Induced Vibration Modes and Natural Frequencies of Piezoelectric Ultrasonic Microsensors on Buckled Diaphragm Structures

被引：0

作者：

Yamashita, Kaoru ^{[1
]}

Dei, Wataru ^{[1
]}

Fuji, Shota ^{[1
]}

Suetaka, Tomoya ^{[1
]}

Yi, Zhengxin ^{[1
]}

Nishioka, Tomoki ^{[1
]}

机构：

[1] Kyoto Inst Technol, Grad Sch Sci & Technol, Kyoto, Japan

来源：

2021 IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (IEEE ISAF 2021) / INTERNATIONAL SYMPOSIUM ON INTEGRATED FUNCTIONALITIES (ISIF) / PIEZORESPONSE FORCE MICROSCOPY WORKSHOP (PFM) | 2021年

基金：

日本学术振兴会;

关键词：

Ultrasonic sensor; Vibration mode; Natural frequency; Diaphragm; Buckling;

D O I：

10.1109/ISAF51943.2021.9477364

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Pulse-induced vibration modes and their natural frequencies were analytically investigated on buckled diaphragm structures that enhance the sensitivity of piezoelectric ultrasonic microsensors. The diaphragm was modeled as a simplified one-dimensional beam and the natural frequency was analytically calculated using low of the conservation of energy. The strain by lateral stretching in vibration on the buckled structure was taken into account in the potential energy as well as the strain by bending deformation, and the natal frequency was expressed as a function of the buckling deflection. The analytical results were compared with those of the experimental measurement and they were in good agreement with each other from the viewpoint of the frequency change of each vibration mode and mode degeneration by approaching frequencies.

引用

页数：4

共 4 条

[1]

Timoshenko S., 1959, Theory of Plates and Shells, V2

[2]

Timoshenko S., 1937, Vibration Problems in Engineering, V2nd ed.

[3]

Yamashita K., 2018, MDPI P, V2, P835, DOI 10.3390/proceedings2130835

[4] Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement [J].

Yamashita, Kaoru ;

Nishimoto, Hiroki ;

Okuyama, Masanori .

SENSORS AND ACTUATORS A-PHYSICAL, 2007, 139 (1-2) :118-123

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