Preparation of large area and investigation of initial film growth of YBa2Cu3O7 by scanning pulsed laser deposition

被引：18
作者：
Wu, KH
Wang, RC
Chen, SP
Lin, HC
Juang, JY
Uen, TM
Gou, YS
机构：
[1] Institute of Electrophysics, National Chiao Tung University
来源：
APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 03期
关键词：
D O I：
10.1063/1.118081
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A pulsed laser deposition system with a rotating reflector, which can generate an extended plume with a diameter of about 40 mm, has been proven to be viable in producing large area YBa2Cu3O7 (YBCO) thin films. Films with uniformity of thickness and electrical properties to within a few percents were obtained. By making a further modification on this laser scanning system, YBCO films with various thicknesses can be deposited in situ on several pieces of substrates under essentially identical deposition conditions, and particularly, in a continuous fashion. The atomic force microscopy (AFM) images reveal that films grown on NdGaO3 follow the Stranski-Krastanov (layer then island growth) mode, while films grown on as-polished MgO and on annealed MgO follow the Volmer-Weber (islands without layer growth) mode and step-flow mode, respectively. (C) 1996 American Institute of Physics.
引用
收藏
页码：421 / 423
页数：3
相关论文
共 14 条
  • [1] ORIGIN OF SURFACE-ROUGHNESS FOR C-AXIS ORIENTED Y-BA-CU-O SUPERCONDUCTING FILMS
    CHANG, CC
    WU, XD
    RAMESH, R
    XI, XX
    RAVI, TS
    VENKATESAN, T
    HWANG, DM
    MUENCHAUSEN, RE
    FOLTYN, S
    NOGAR, NS
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (17) : 1814 - 1816
  • [2] THE SURFACE OF THE (001) SRTIO3-DELTA SUBSTRATE AT HIGH-TEMPERATURE
    CHIN, CC
    MORISHITA, T
    [J]. PHYSICA C, 1995, 245 (1-2): : 77 - 83
  • [3] PULSED LASER DEPOSITION OF HIGH-TC SUPERCONDUCTING THIN-FILMS FOR ELECTRONIC DEVICE APPLICATIONS
    CHRISEY, DB
    INAM, A
    [J]. MRS BULLETIN, 1992, 17 (02) : 37 - 43
  • [4] EFFECT OF ATOMIC OXYGEN ON THE INITIAL GROWTH MODE IN THIN EPITAXIAL CUPRATE FILMS
    FREY, T
    CHI, CC
    TSUEI, CC
    SHAW, T
    BOZSO, F
    [J]. PHYSICAL REVIEW B, 1994, 49 (05): : 3483 - 3491
  • [5] PREPARATION AND NANOSCALE CHARACTERIZATION OF HIGHLY STABLE YBA2CU3O7-DELTA THIN-FILMS
    KAWASAKI, M
    GONG, JP
    NANTOH, M
    HASEGAWA, T
    KITAZAWA, K
    KUMAGAI, M
    HIRAI, K
    HORIGUCHI, K
    YOSHIMOTO, M
    KOINUMA, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (04): : 1612 - 1616
  • [6] GROWTH OF YBA2CU3O7 THIN-FILMS ON MGO - THE EFFECT OF SUBSTRATE PREPARATION
    MOECKLY, BH
    RUSSEK, SE
    LATHROP, DK
    BUHRMAN, RA
    LI, J
    MAYER, JW
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (16) : 1687 - 1689
  • [7] NATURE OF PREFERRED ORIENTATION OF YBA2CU3OX THIN-FILMS
    MUKAIDA, M
    MIYAZAWA, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1993, 32 (10): : 4521 - 4528
  • [8] SURFACE PREPARATION FOR THE HETEROEPITACTIC GROWTH OF CERAMIC THIN-FILMS
    NORTON, MG
    SUMMERFELT, SR
    CARTER, CB
    [J]. APPLIED PHYSICS LETTERS, 1990, 56 (22) : 2246 - 2248
  • [9] MATERIALS ENGINEERING PROBLEMS IN CRYSTAL-GROWTH AND EPITAXY OF CUPRATE SUPERCONDUCTORS
    SCHEEL, HJ
    [J]. MRS BULLETIN, 1994, 19 (09) : 26 - 32
  • [10] MICROSTRUCTURE OF ULTRATHIN FILMS OF YBA2CU3O7-DELTA ON MGO
    STREIFFER, SK
    LAIRSON, BM
    EOM, CB
    CLEMENS, BM
    BRAVMAN, JC
    GEBALLE, TH
    [J]. PHYSICAL REVIEW B, 1991, 43 (16): : 13007 - 13018
12