A high precision micro/nano CMM using piezoresistive tactile probes

被引：54

作者：

Dai, Gaoliang ^{[1
]}

Buetefisch, Sebastian ^{[1
]}

Pohlenz, Frank ^{[1
]}

Danzebrink, Hans-Ulrich ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2009年 / 20卷 / 08期

关键词：

nano and micro metrology; scanning probe microscopy; coordinate measuring machine; 3D probe; SYSTEMS;

D O I：

10.1088/0957-0233/20/8/084001

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

To satisfy various demands of micro- and nanoscale-dimensional metrology, a coordinate measuring system based on a nano positioning and measuring machine (NMM) has been built. The measuring system is able to perform measurements by using sensors such as scanning force microscopes, stylus profilometers, optical fixed focus sensors and assembled cantilever probes. In recent years, two kinds of tactile micro/nano CMM probes have been developed and coupled to the system. In such a way, the function of the device has been expanded from a metrological SFM to a micro/nano CMM. In this paper, the development of the micro/nano CMM is reported. The design ideas concerning the key components of the CMM, such as positioning stage, probe and software, are introduced. The characterization of the probe is described in more detail. Measurements on a typical test artefact have been demonstrated as an example.

引用

页数：9

共 15 条

[1]

Butefisch S., 1999, 9 INT TRAD FAIR C SE, V2, P321

[2]

DAI G, 2007, P 7 EUSP INT C EUR S, V1, P242

[3] Nanoscale surface measurements at sidewalls of nano- and micro-structures [J].

Dai, Gaoliang ;

Wolff, Helmut ;

Weimann, Thomas ;

Xu, Min ;

Pohlenz, Frank ;

Danzebrink, Hans-Ulrich .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2007, 18 (02) :334-341

[4] Linking up various detection systems for dimensional measurements in the micro- and nanorange with the Nanomeasuring Machine [J].

Dai, Gaoliang ;

Pohlenz, Frank ;

Danzebrink, Hans-Ulrich .

TM-TECHNISCHES MESSEN, 2006, 73 (09) :472-484

[5] Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures [J].

Dai, Gaoliang ;

Wolff, Helmut ;

Danzebrink, Hans-Ulrich .

APPLIED PHYSICS LETTERS, 2007, 91 (12)

[6] Metrological large range scanning probe microscope [J].

Dai, GL ;

Pohlenz, F ;

Danzebrink, HU ;

Xu, M ;

Hasche, K ;

Wilkening, G .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (04) :962-969

[7]

FRUHAUF J, 2004, P 4 EUSP INT C EUR S, P362

[8]

Jäger G, 2000, TECH MESS, V67, P319

[9] Ultraprecision micro-CMM using a low force 3D touch probe [J].

Kueng, A. ;

Meli, F. ;

Thalmann, R. .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2007, 18 (02) :319-327

[10]

MELI F, 2005, ULTRAPRAZISES KOORDI, P12

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