In-Fiber Cascaded FPI Fabricated by Chemical-Assisted Femtosecond Laser Micromachining for Micro-Fluidic Sensing Applications

被引:29
|
作者
Zhou, Peng [1 ]
Liao, Changrui [1 ]
Li, Zhengyong [1 ]
Liu, Shen [1 ]
Wang, Yiping [1 ]
机构
[1] Shenzhen Univ, Coll Optoelect Engn, Minist Educ & Guangdong Prov, Key Lab Optoelect Devices & Syst, Shenzhen 518060, Peoples R China
基金
中国国家自然科学基金;
关键词
Femtosecond laser micromachining; fiber F-P interferometer; micro-fluidic sensing; FABRY-PEROT-INTERFEROMETER; REFRACTIVE-INDEX MEASUREMENT; PRESSURE SENSOR; HIGH-RESOLUTION; TIP SENSOR; CRYSTAL; CAVITY; STRAIN;
D O I
10.1109/JLT.2019.2912835
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An ultra-compact cascaded Fabry Perot (F-P) interferometer in fiber, which exhibits a high-visibility and enhanced detection limit, has been developed by chemical-assisted femtosecond laser micromachining. The reflection spectrum of the cascaded F-P interferometer shows stronger and narrower resonance than single F-P cavity. The liquid refractive index (RI) measurement demonstrates that the wavelength sensitivity and the dip intensity sensitivity are similar to 888 nm/RIU and -882 dB/nm/RIU, respectively, and the obtained detection limit is 4.22 x 10(-5) RIU in RI range 1.325-1.330, which is higher than that of the conventional single F-P cavity in optical fibers based on wavelength modulation (10(-4) RIU). Moreover, the gas pressure measurement demonstrates that the wavelength sensitivity is 2.86 nm/MPa and the detection limit reaches 1.311 x 10(-2) MPa in pressure range 1.5-2.0 MPa. The proposed in-fiber cascaded F-P interferometer will find potential applications in chemical and biological sensors, biomedical probes, and low-cost care products.
引用
收藏
页码:3214 / 3221
页数:8
相关论文
共 19 条
  • [1] In-fiber whispering-gallery-mode resonator fabricated by femtosecond laser micromachining
    Shi, Leilei
    Zhu, Tao
    Huang, Dongmei
    Liu, Min
    Deng, Ming
    Huang, Wei
    OPTICS LETTERS, 2015, 40 (16) : 3770 - 3773
  • [2] In-Fiber Grating Fabricated by Femtosecond Laser Direct Writing for Strain Sensing
    Huang, Quandong
    Yu, Yongqin
    Ruan, Shuangchen
    Li, Xuejin
    Chen, Xue
    Zhang, Yufeng
    Zhou, Wen
    Du, Chenlin
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 27 (11) : 1216 - 1219
  • [3] Fiber inline Michelson interferometer fabricated by one-step femtosecond laser micromachining for sensing applications
    Yuan, Lei
    Wu, Hongbin
    Wang, Cong
    Yu, Yingyu
    Wang, Sumei
    Xiao, Hai
    2013 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTICAL SENSORS AND APPLICATIONS, 2013, 9044
  • [4] Direct laser-assisted processing of polymers for micro-fluidic and micro-optical applications
    Pfleging, W
    Böhm, J
    Finke, S
    Gaganidze, E
    Hanemann, T
    Heidinger, R
    Litfin, K
    PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II, 2003, 4977 : 346 - 356
  • [5] Water-assisted femtosecond laser micromachining of micro-cavities in optical fiber
    Wang, Min
    Ye, Qing
    Ren, Yanqin
    Yang, Fan
    INTEGRATED FERROELECTRICS, 2017, 181 (01) : 78 - 82
  • [6] Capillary Fiber Bragg Grating Fabricated by Femtosecond Laser for Sensing Applications
    Liu, Shuhui
    Huang, Chenxi
    Liu, Ningliang
    Zhang, Hailiang
    Lu, Peixiang
    Shum, Perry Ping
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2020, 32 (13) : 783 - 786
  • [7] Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
    Bellouard, Y
    Said, A
    Dugan, M
    Bado, P
    OPTICS EXPRESS, 2004, 12 (10): : 2120 - 2129
  • [8] Study on characteristics and fluid sensing of unparallel wall fiber micro-cavity Mach-Zehnder interferometer fabricated by femtosecond laser micromachining
    Yin Li-Mei
    Zhang Wei-Gang
    Xue Xiao-Lin
    Bai Zhi-Yong
    Wei Shi-Lei
    ACTA PHYSICA SINICA, 2012, 61 (17)
  • [9] Review of optical fiber Mach-Zehnder interferometers with micro-cavity fabricated by femtosecond laser and sensing applications
    Zhao, Yong
    Zhao, Hang
    Lv, Ri-Qing
    Zhao, Jian
    OPTICS AND LASERS IN ENGINEERING, 2019, 117 : 7 - 20
  • [10] All-in-fiber optofluidic sensor fabricated by femtosecond laser assisted chemical etching
    Yuan, Lei
    Huang, Jie
    Lan, Xinwei
    Wang, Hanzheng
    Jiang, Lan
    Xiao, Hai
    OPTICS LETTERS, 2014, 39 (08) : 2358 - 2361