3.2-MP Back-Illuminated Polarization Image Sensor With Four-Directional Air-Gap Wire Grid and 2.5-μm Pixels

被引：80

作者：

Maruyama, Yasushi ^{[1
]}

Terada, Takashi ^{[2
]}

Yamazaki, Tomohiro ^{[2
]}

Uesaka, Yusuke ^{[1
]}

Nakamura, Motoaki ^{[1
]}

Matoba, Yoshihisa ^{[1
]}

Komori, Kenta ^{[2
]}

Ohba, Yoshiyuki ^{[2
]}

Arakawa, Shinichi ^{[1
]}

Hirasawa, Yasutaka ^{[3
]}

Kondo, Yuhi ^{[3
]}

Murayama, Jun ^{[3
]}

Akiyama, Kentaro ^{[1
]}

Oike, Yusuke ^{[1
]}

Sato, Shuzo ^{[1
]}

Ezaki, Takayuki ^{[1
]}

机构：

[1] Sony Semicond Solut Corp, Atsugi, Kanagawa 2430014, Japan

[2] Sony Semicond Mfg Corp, Kikuyo 8691102, Japan

[3] Sony Corp, Tokyo 1080075, Japan

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2018年 / 65卷 / 06期

关键词：

PolarizationCMOSimage sensor; wire-grid polarizer (WGP); FOCAL-PLANE POLARIMETER; DIVISION;

D O I：

10.1109/TED.2018.2829190

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A 3.2-MP four-directional polarization image sensor with air-gap wire-grid polarizer is described. The image sensor was fabricated using a wafer process and incorporates back-illuminationand an antireflection layer to minimize optical flaring and ghosting problems. In testing, the sensor achieved a polarization transmittance of 63.3% and an extinction ratio of 85 at 550 nm, thereby outperforming conventional polarization sensors. The proposedsensor also exhibited good oblique-incidence characteristics, even with small polarization pixels of 2.5 mu m. Based on these results, the proposed image sensor is suitable for various megapixel fusion-imaging applications, such as reducing surface reflections, highly accurate depth mapping, and condition-robust surveillance.

引用

页码：2544 / 2551

页数：8

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