Experimental investigation and numerical modeling of the thermal behavior of a micro-heater

被引:2
作者
Lemeunier, Franck [1 ]
Allanic, Nadine [1 ]
Belhabib, Sofiane [1 ]
Mousseau, Pierre [1 ]
Plot, Christophe [1 ]
机构
[1] Univ Nantes, LUNAM Univ, CNRS, IUT Nantes,GEPEA,UMR 6144, F-44475 Carquefou, France
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2016年 / 22卷 / 01期
关键词
BOROSILICATE GLASS; CONTACT RESISTANCE; GAS SENSORS; DESIGN; CONDUCTIVITY; COMPOSITES; DEVICES;
D O I
10.1007/s00542-014-2373-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In micro-heater, heat flux is generated by Joule effect thanks to short electric pulses. This leads to a rapid increase of the micro-heater temperature that reaches a few hundreds degree Celsius in a few microseconds. In addition to this, the cyclic nature of the energizing signal may cause an excessive heat accumulation and hence a reduction of the device life expectancy. It is thus of utmost importance to accurately model heat transfer in the whole device. This work focuses on a 200 dots per inch printing head system which consists of a row of micro-heaters. Structure and chemical composition of a single micro-heater are determined by scanning electron microscopy coupled to an EDX analyzer (energy dispersive X-ray spectrometry). These data are used to build a two dimensional numerical model which represents a micro-heater cross-section. This model gives the spatiotemporal evolution of the temperature field which highlights clearly the thermal loading phenomenon in the micro-heaters. In parallel, electric measurements are performed during the printing process to access to the actual power supplied to the micro-heaters. Infrared thermography was used to measure the thermal response of the micro-heaters to the electrical solicitation. The comparison of experimental and numerical results shows that the numerical model correctly predicts the thermal behavior of micro-heaters.
引用
收藏
页码:181 / 191
页数:11
相关论文
共 28 条
[1]  
Bergman T.L., 2011, Introduction to Heat Transfer. s.l
[2]   Thermal and mechanical characterization of borosilicate glass [J].
Bouras, N. ;
Madjoubi, M. A. ;
Kolli, M. ;
Benterki, S. ;
Hamidouche, M. .
PROCEEDINGS OF THE JMSM 2008 CONFERENCE, 2009, 2 (03) :1135-1140
[3]  
Bradbury R, 2000, ELSEVIER SCI, P35, DOI [10.1016/B978-044482888-0/50033-7, DOI 10.1016/B978-044482888-0/50033-7]
[4]   Micro-heaters embedded in PDMS fabricated using dry peel-off process [J].
Byun, Ikjoo ;
Ueno, Ryohei ;
Kim, Beomjoon .
MICROELECTRONIC ENGINEERING, 2014, 121 :1-4
[5]   CMOS compatible micro-oven heater for efficient thermal control of silicon photonic devices [J].
Cao, Liang ;
Aboketaf, Abdelsalam A. ;
Preble, Stefan F. .
OPTICS COMMUNICATIONS, 2013, 305 :66-70
[6]   Enhanced H2S sensing characteristics of Pt doped SnO2 nanofibers sensors with micro heater [J].
Dong, Ki-Young ;
Choi, Joong-Ki ;
Hwang, In-Sung ;
Lee, Jin-Woo ;
Kang, Byung Hyun ;
Ham, Dae-Jin ;
Lee, Jong-Heun ;
Ju, Byeong-Kwon .
SENSORS AND ACTUATORS B-CHEMICAL, 2011, 157 (01) :154-161
[7]  
Drees F, 1989, COMPEURO 89 VLSI COM, P8, DOI [10.1109/CMPEUR.1989.93368, DOI 10.1109/CMPEUR.1989.93368]
[8]   Fatigue life of lead-free solder thermal interface materials at varying bond line thickness in microelectronics [J].
Ekpu, Mathias ;
Bhatti, Raj ;
Okereke, Michael I. ;
Mallik, Sabuj ;
Otiaba, Kenny .
MICROELECTRONICS RELIABILITY, 2014, 54 (01) :239-244
[9]   Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors [J].
Hwang, Woo-Jin ;
Shin, Kyu-Sik ;
Roh, Ji-Hyoung ;
Lee, Dae-Sung ;
Choa, Sung-Hoon .
SENSORS, 2011, 11 (03) :2580-2591
[10]   Analytical and numerical studies on microscale heat sinks for electronic applications [J].
Kulkarni, DP ;
Das, DK .
APPLIED THERMAL ENGINEERING, 2005, 25 (14-15) :2432-2449