Design, testing and calibration of an integrated Mach-Zehnder based optical read-out architecture for MEMS characterization

被引：7

作者：

Sabac, A ^{[1
]}

Gorecki, C ^{[1
]}

Jozwik, M ^{[1
]}

机构：

[1] Univ Franche Comte, Dept Opt PM Duffieux, Inst FEMTO ST, CNRS,UMR 6603, F-25030 Besancon, France

来源：

OPTICAL MICRO- AND NANOMETROLOGY IN MANUFACTURING TECHNOLOGY | 2004年 / 5458卷

关键词：

microsensors; integrated optics; MOEMS; Mach-Zehnder interferometer;

D O I：

10.1117/12.546299

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will allow the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical proper-ties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer (MZI), monolithically integrated with the piezoelectric (PZT) actuated membrane.

引用

页码：141 / 146

页数：6

共 14 条

[1] Silicon anti-resonant reflecting optical waveguides for sensor applications [J].

Benaissa, K ;

Nathan, A .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 65 (01) :33-44

[2] INTEGRATED-OPTICS COMBINED WITH MICROMECHANICS ON SILICON [J].

BEZZAOUI, H ;

VOGES, E .

SENSORS AND ACTUATORS A-PHYSICAL, 1991, 29 (03) :219-223

[3] ELASTOOPTICAL PROPERTIES OF SION LAYERS IN AN INTEGRATED OPTICAL INTERFEROMETER USED AS A PRESSURE SENSOR [J].

FISCHER, K ;

MULLER, J ;

HOFFMANN, R ;

WASSE, F ;

SALLE, D .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1994, 12 (01) :163-169

[4] An integrated opto-mechanical sensor for in situ characterisation of MEMS: the implementing of a read out architecture [J].

Gorecki, C ;

Sabac, A ;

Bey, P ;

Gut, K ;

Jacobelli, A ;

Dean, T .

MICROSYSTEMS ENGINEERING: METROLOGY AND INSPECTION III, 2003, 5145 :189-195

[5] Characterisation of internal stress of silicon oxinitride thin films fabricated by plasma-enhanced chemical vapour deposition:: applications in Integrated Optics [J].

Gorecki, C ;

Sabac, A ;

Józwik, M ;

Lee, SS .

ADVANCED PHOTONIC SENSORS AND APPLICATIONS II, 2001, 4596 :9-15

[6] Evaluation of micromechanical properties of buckled SiOxNy-loaded membranes by combining the Twyman-Green interferometry with nanoindentation and point-wise deflection technique [J].

Józwik, M ;

Gorecki, C ;

Sabac, A ;

Delobelle, P ;

Kujawinska, M .

OPTICS AND LASERS IN ENGINEERING, 2004, 41 (05) :703-716

[7]

JOZWIK M, 2003, UNPUB THIN SOLID FIL

[8] INTEGRATED OPTIC PRESSURE SENSOR ON SILICON SUBSTRATE [J].

OHKAWA, M ;

IZUTSU, M ;

SUETA, T .

APPLIED OPTICS, 1989, 28 (23) :5153-5157

[9] INTEGRATED-OPTICS BASED ON SILICON OXYNITRIDE THIN-FILMS DEPOSITED ON SILICON SUBSTRATES FOR SENSOR APPLICATIONS [J].

PETERS, D ;

FISCHER, K ;

MULLER, J .

SENSORS AND ACTUATORS A-PHYSICAL, 1991, 26 (1-3) :425-431

[10] Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor [J].

Porte, H ;

Gorel, V ;

Kiryenko, S ;

Goedgebuer, JP ;

Daniau, W ;

Blind, P .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1999, 17 (02) :229-233

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