Flexible PZT thin film transferred on polymer substrate

被引：15

作者：

Dufay, Thibault ^{[1
]}

Guiffard, Benoit ^{[1
]}

Seveno, Raynald ^{[1
]}

Ginestar, Stephane ^{[1
]}

Thomas, Jean-Christophe ^{[2
]}

机构：

[1] Univ Nantes, Univ Bretagne Loire, IETR UMR CNRS 6164, Fac Sci & Tech, BP 92208,2 Rue Houssiniere, F-44322 Nantes 3, France

[2] Univ Nantes, Univ Bretagne Loire, GeM UMR CNRS 6183, Fac Sci & Tech, BP 92208,2 Rue Houssiniere, F-44322 Nantes 3, France

来源：

SURFACE & COATINGS TECHNOLOGY | 2018年 / 343卷

关键词：

Flexible PZT; Polymer substrate; Transfer process; Ferroelectric properties;

D O I：

10.1016/j.surfcoat.2017.09.080

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Highly flexible lead zirconate titanate, Pb(Zr,Ti)O-3 (PZT), thin films have been realized by an all chemical process on a plastic substrate. The procedure is composed of three steps: the first one is the PZT deposition on aluminium thin substrate, the second step corresponds to the bonding PZT thin film to a polymer layer and the final step is the aluminium substrate etching. Diffractions and microscopy techniques were used to check the quality of the new PZT/polymer composite structure. Polarization hysteresis and permittivity measurements were also performed to determine the electrical characteristics of the composite. These results demonstrate that the recently developed PZT/polymer thin films are very attractive for both bending actuation and sensing as well as for low frequency vibrating energy harvesting applications.

引用

页码：148 / 152

页数：5

共 10 条

[1] Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process [J].

Do, Young Ho ;

Jung, Woo Suk ;

Kang, Min Gyu ;

Kang, Chong Yun ;

Yoon, Seok Jin .

SENSORS AND ACTUATORS A-PHYSICAL, 2013, 200 :51-55

[2] Fabrication of flexible device based on PAN-PZT thin films by laser lift-off process [J].

Do, Young Ho ;

Kang, Min Gyu ;

Kim, Jin Sang ;

Kang, Chong Yun ;

Yoon, Seok Jin .

SENSORS AND ACTUATORS A-PHYSICAL, 2012, 184 :124-127

[3]

Dufay T, 2016, 2016 JOINT IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, EUROPEAN CONFERENCE ON APPLICATION OF POLAR DIELECTRICS, AND PIEZOELECTRIC FORCE MICROSCOPY WORKSHOP (ISAF/ECAPD/PFM)

[4] Transverse piezoelectric coefficient measurement of flexible lead zirconate titanate thin films [J].

Dufay, T. ;

Guiffard, B. ;

Thomas, J. -C. ;

Seveno, R. .

JOURNAL OF APPLIED PHYSICS, 2015, 117 (20)

[5] Degradation in the ferroelectric and piezoelectric properties of Pb(Zr, Ti) O3 thin films derived from a MEMS microfabrication process [J].

Kobayashi, T. ;

Ichiki, M. ;

Kondou, R. ;

Nakamura, K. ;

Maeda, R. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (07) :1238-1241

[6] Highly-Effi cient, Flexible Piezoelectric PZT Thin Film Nanogenerator on Plastic Substrates [J].

Park, Kwi-Il ;

Son, Jung Hwan ;

Hwang, Geon-Tae ;

Jeong, Chang Kyu ;

Ryu, Jungho ;

Koo, Min ;

Choi, Insung ;

Lee, Seung Hyun ;

Byun, Myunghwan ;

Wang, Zhong Lin ;

Lee, Keon Jae .

ADVANCED MATERIALS, 2014, 26 (16) :2514-2520

[7] Flexible PET/Al/PZT/Al/PET multi-layered composite for low frequency energy harvesting [J].

Seveno, R. ;

Carbajo, J. ;

Dufay, T. ;

Guiffard, B. ;

Thomas, J. C. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2017, 50 (16)

[8]

Seveno R, 2015, 2015 JOINT IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRIC, INTERNATIONAL SYMPOSIUM ON INTEGRATED FUNCTIONALITIES AND PIEZOELECTRIC FORCE MICROSCOPY WORKSHOP (ISAF/ISIF/PFM), P94, DOI 10.1109/ISAF.2015.7172677

[9] Ultra light tunable capacitor based on PZT thin film deposited onto aluminium foil [J].

Seveno, R. ;

Averty, D. .

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2013, 68 (02) :175-179

[10] Chemical Reactions During Wet-Etching Process of LSMO/PZT/LSMO-Structured Device Fabrication [J].

Yeh, Tsung-Her ;

Suresh, M. B. ;

Shen, Jun-Nan ;

Yu, Jyh-Cheng ;

Chou, Chen-Chia .

FERROELECTRICS, 2009, 380 :97-101

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