Simulation of vibratory micromachined gyroscope with fence structure

被引：0
|
作者：
Che, LF [1 ]
Xiong, B [1 ]
Huang, XZ [1 ]
Wang, YL [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
来源：
INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION | 2002年 / 3卷 / 3-4期
关键词：
MEMS; angular rate sensor; equivalent electrical simulation;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is derived according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis which consist of detection oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables the sensor simulation with the interfacing electronics to analyze the whole performances of the system and optimize design of testing circuits.
引用
收藏
页码：333 / 336
页数：4
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