Simulation of vibratory micromachined gyroscope with fence structure

被引：0
|
作者：
Che, LF [1 ]
Xiong, B [1 ]
Huang, XZ [1 ]
Wang, YL [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
来源：
INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION | 2002年 / 3卷 / 3-4期
关键词：
MEMS; angular rate sensor; equivalent electrical simulation;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is derived according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis which consist of detection oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables the sensor simulation with the interfacing electronics to analyze the whole performances of the system and optimize design of testing circuits.
引用
收藏
页码：333 / 336
页数：4
相关论文
共 50 条
  • [1] SYSTEM-LEVEL SIMULATION OF VIBRATORY MICROMACHINED GYROSCOPE WITH FENCE STRUCTURE
    车录锋
    熊斌
    王跃林
    Acta Mechanica Sinica, 2004, 20 (02) : 172 - 177
  • [2] System-level simulation of vibratory micromachined gyroscope with fence structure
    Che Lufeng
    Xiong Bin
    Wang Yuelin
    Acta Mechanica Sinica, 2004, 20 (2) : 172 - 177
  • [3] System-level simulation of vibratory micromachined gyroscope with fence structure
    Che, LF
    Xiong, B
    Wang, YL
    ACTA MECHANICA SINICA, 2004, 20 (02) : 172 - 177
  • [4] Simulation Analysis of A Symmetrical Micromachined Vibratory Rate Gyroscope
    Cao Jin
    Cui Mei
    Liu Xiaoqin
    He Wei
    Deng Zhantao
    PROCEEDINGS OF THE 2012 SECOND INTERNATIONAL CONFERENCE ON INSTRUMENTATION & MEASUREMENT, COMPUTER, COMMUNICATION AND CONTROL (IMCCC 2012), 2012, : 482 - 485
  • [5] System modelling of a vibratory micromachined gyroscope with bar structure
    Che, LF
    Xiong, B
    Wang, YL
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (01) : 65 - 71
  • [6] Design and simulation of a novel micromachined vibratory gyroscope with enhanced sensitivity performance
    Lin, RM
    Wang, Z
    Leow, KW
    Lim, MK
    Sridhar, U
    Miao, YB
    Feng, HH
    DESIGN, CHARACTERIZATION, AND PACKAGING FOR MEMS AND MICROELECTRONICS II, 2001, 4593 : 72 - 81
  • [7] Research on a monolithic triaxial micromachined vibratory gyroscope
    Department of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
    Gaojishu Tongxin, 2006, 10 (1034-1038):
  • [8] Silicon bulk micromachined vibratory gyroscope for microspacecraft
    Tang, TK
    Gutierrez, RC
    Wilcox, JZ
    Stell, C
    Vorperian, V
    Dickerson, M
    Goldstein, B
    Savino, JL
    Li, WJ
    Calvet, R
    Charkaborty, I
    Bartman, R
    Kaiser, WJ
    SPACE SCIENCECRAFT CONTROL AND TRACKING IN THE NEW MILLENNIUM, 1996, 2810 : 101 - 115
  • [9] A surface-micromachined tunable vibratory gyroscope
    Oh, Y
    Lee, B
    Baek, S
    Kim, H
    Kim, J
    Kang, S
    Song, C
    MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, : 272 - 277
  • [10] Analysis on quadrature error of micromachined vibratory gyroscope
    Xu, Yishen
    Wang, Shourong
    Ji, Xunsheng
    Sheng, Ping
    Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2006, 27 (SUPPL.): : 105 - 107
12345