Electrochemical impedance spectroscopy study of Ta2O5 based EIOS pH sensors in acid environment

被引：62

作者：

Chen, Miao ^{[1
]}

Jin, Yan ^{[1
,2
,3
]}

Qu, Xiaohu ^{[1
]}

Jin, Qinghui ^{[2
]}

Zhao, Jianlong ^{[2
]}

机构：

[1] CSIRO Proc Sci & Engn, Clayton, Vic 3168, Australia

[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China

[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2014年 / 192卷

关键词：

Electrolyte-ion sensitive; membrane-oxide-semiconductor; Tantalum pentoxide; pH sensitivity; Capacitance voltage method; Interference; FIELD-EFFECT SENSORS; CAPACITANCE-VOLTAGE; DOUBLE-LAYER; ION; ISFET; MEMBRANE; DEVICES; OXIDE; DRIFT; HYSTERESIS;

D O I：

10.1016/j.snb.2013.10.129

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

To develop an on-line pH sensor for acidic environment application, a tantalum pentoxide (Ta2O5) based electrolyte-ion sensitive membrane-oxide-semiconductor (EIOS) pH sensor has been prepared and investigated by applying electrochemical impedance spectroscopy (EIS) and capacitance-voltage method (C-V). Nernstian behavior toward variable proton concentrations (similar to 56.19 mV/pH) in the pH range from 1 to 10 could be achieved. Atomic force microscopic (AFM) showed that the surface of the H+ sensitive Ta2O5 film was uniform and smooth. Electrochemical impedance spectroscopy (EIS) revealed that the space charge capacitance easily distinguish pH changes. Possible interference from Cu2+, Fe2+ and Fe3+ were studied in pH 2.2 solutions. Crown Copyright (C) 2013 Published by Elsevier B.V. All rights reserved.

引用

页码：399 / 405

页数：7

共 34 条

[1] Thirty years of ISFETOLOGY - What happened in the past 30 years and what may happen in the next 30 years [J].