Large-Area Flexible Printed Thin-Film Transistors with Semiconducting Single-Walled Carbon Nanotubes for NO2 Sensors

被引:53
作者
Wang, Xin [1 ,2 ]
Wei, Miaomiao [2 ]
Li, Xiaoqian [1 ,2 ]
Shao, Shuangshuang [2 ]
Ren, Yunfei [2 ]
Xu, Wenjing [2 ]
Li, Min [2 ]
Liu, Wentao [1 ]
Liu, Xuying [1 ]
Zhao, Jianwen [2 ]
机构
[1] Zhengzhou Univ, Sch Mat Sci & Engn, Zhengzhou 450001, Henan, Peoples R China
[2] Chinese Acad Sci, Printable Elect Res Ctr, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Jiangsu, Peoples R China
关键词
screen-printed silver electrodes; AlOx; dielectric; single-walled carbon nanotubes (SWCNTs); thin-film transistors (TFTs); flexible NO2 sensor;
D O I
10.1021/acsami.0c13824
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Development of large-area, low-cost, low-voltage, low-power consumption, flexible high-performance printed carbon nanotube thin-film transistors (TFTs) is helpful to promote their future applications in sensors and biosensors, wearable electronics, and the Internet of things. In this work, low-voltage, flexible printed carbon nanotube TFTs with a large-area and low-cost fabrication process were successfully constructed using ultrathin (similar to 3.6 nm) AlOx thin films formed by plasma oxidation of aluminum as dielectrics and screen-printed silver electrodes as contact electrodes. The as-prepared bottom-gate/bottom-contact carbon nanotube TFTs exhibit a low leakage current (similar to 10(-10) A), a high charge carrier mobility (up to 9.9 cm(2) V-1 s(-1)), high on/off ratios (higher than 10(5)), and small subthreshold swings (80-120 mV/dec) at low operation voltages (from -1.5 to 1 V). At the same time, printed carbon nanotube TFTs showed a high response (Delta R/R = 99.6%) to NO2 gas even at 16 ppm with a faster response and recovery speed (similar to 8 s, exposure to 0.5 ppm NO2), a lower detection limit (0.069 ppm NO2), and a low power consumption (0.86 mu W, exposure to 16 ppm NO2) at a gate voltage of 0.2 V at room temperature. Moreover, the printed carbon nanotube devices exhibited excellent mechanical flexibility and bias stress stability after 12,000 bending cycles at a radius of 5 mm and a bias stress test for 7200 s at a gate voltage of +/- 1 V, which originated from the ultrathin and compact AlOx dielectric and the super adhesion force between screen-printed silver electrodes and polyethylene terephthalate substrates.
引用
收藏
页码:51797 / 51807
页数:11
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