Three-flat test solutions based on simple mirror symmetry

被引：94

作者：

Griesmann, Ulf ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Mfg Engn Lab, Gaithersburg, MD 20899 USA

来源：

APPLIED OPTICS | 2006年 / 45卷 / 23期

关键词：

D O I：

10.1364/AO.45.005856

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In interferometric surface and wavefront metrology, three-flat, tests are the archetypes of measurement procedures to separate errors in the interferometer reference wavefront from errors due to the test part surface, so-called absolute tests. What is believed to be a new class of solutions of the three-flat problem for circular flats is described in terms of functions that are symmetric or antisymmetric with respect to reflections at a single line passing through the center of the flat surfaces. The new solutions are simpler and easier to calculate than the known solutions based on twofold mirror symmetry or rotation symmetry. Strategies for effective azimuthal averaging and a method for determining the averaging error are also discussed.

引用

页码：5856 / 5865

页数：10

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