Micropatterned Pyramidal Ionic Gels for Sensing Broad-Range Pressures with High Sensitivity

被引:340
作者
Cho, Sung Hwan [1 ]
Lee, Seung Won [1 ]
Yu, Seunggun [1 ]
Kim, Hyeohn [1 ]
Chang, Sooho [2 ]
Kang, Donyoung [2 ]
Hwang, Ihn [1 ]
Kang, Han Sol [1 ]
Jeong, Beomjin [1 ]
Kim, Eui Hyuk [1 ]
Cho, Suk Man [1 ]
Kim, Kang Lib [1 ]
Lee, Hyungsuk [2 ]
Shim, Wooyoung [1 ]
Park, Cheolmin [1 ]
机构
[1] Yonsei Univ, Dept Mat Sci & Engn, Yonsei ro 50, Seoul 03722, South Korea
[2] Yonsei Univ, Sch Mech Engn, Yonsei ro 50, Seoul 03722, South Korea
基金
新加坡国家研究基金会;
关键词
capacitive pressure sensor; ionic polymer gels; topographical micropattern; arrays of periodic pyramids; high sensitivity; broad range pressure sensing health monitoring; THIN-FILM TRANSISTORS; ELECTRONIC SKIN; CAPACITIVE PRESSURE; GATE DIELECTRICS; SENSOR; TRANSPARENT; GRAPHENE; STRAIN; ELECTROLUMINESCENCE; CONDUCTORS;
D O I
10.1021/acsami.7b00398
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The development of pressure sensors that are effective over a broad range of pressures is crucial for the future development of electronic skin applicable to the detection of a wide pressure range from acoustic wave to dynamic human motion. Here, we present flexible capacitive pressure sensors that incorporate micropatterned pyramidal ionic gels to enable ultrasensitive pressure detection. Our devices show superior pressure-sensing performance, with a broad sensing range from a few pascals up to 50 kPa, with fast response times of <20 ms and a low operating voltage of 0.25 V. Since high-dielectric-constant ionic gels were employed as constituent sensing materials, an unprecedented sensitivity of 41 KPa-1 in the low-pressure regime of <400 Pa could be realized in the context of a metal insulator metal platform. This broad-range capacitive pressure sensor allows for the efficient detection of pressure from a variety of sources, including sound waves, a lightweight object, jugular venous pulses, radial artery pulses, and human finger touch. This platform offers a simple, robust approach to low-cost, scalable device design, enabling practical applications of electronic skin.
引用
收藏
页码:10128 / 10135
页数:8
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