Ferroelectric FET for nonvolatile memory application with two-dimensional MoSe2 channels

被引:101
作者
Wang, Xudong [1 ,2 ,3 ]
Liu, Chunsen [4 ]
Chen, Yan [2 ]
Wu, Guangjian [2 ]
Yan, Xiao [2 ]
Huang, Hai [2 ]
Wang, Peng [2 ]
Tian, Bobo [2 ]
Hong, Zhenchen [5 ]
Wang, Yutao [5 ]
Sun, Shuo [2 ]
Shen, Hong [2 ]
Lin, Tie [2 ]
Hu, Weida [2 ]
Tang, Minghua [1 ,3 ]
Zhou, Peng [4 ]
Wang, Jianlu [2 ]
Sun, Jinglan [2 ]
Meng, Xiangjian [2 ]
Chu, Junhao [2 ]
Li, Zheng [1 ,3 ]
机构
[1] Xiangtan Univ, Sch Mat Sci & Engn, Hunan Prov Key Lab Key Film Mat & Applicat Equipm, Xiangtan 411105, Hunan, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, 500Yu Tian Rd, Shanghai 200083, Peoples R China
[3] Xiangtan Univ, Sch Mat Sci & Engn, Hunan Prov Key Lab Thin Film Mat & Devices, Xiangtan 411105, Hunan, Peoples R China
[4] Fudan Univ, Dept Microelect, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
[5] Univ Sci & Technol China, Dept Phys, Hefei 230000, Peoples R China
来源
2D MATERIALS | 2017年 / 4卷 / 02期
基金
中国国家自然科学基金;
关键词
2D materials; MoSe2; ferroelectric memory; P(VDF-TrFE); Fe-FET; CHEMICAL-VAPOR-DEPOSITION; FIELD-EFFECT TRANSISTOR; MONOLAYER MOS2; TRANSITION;
D O I
10.1088/2053-1583/aa5c17
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Graphene and other two-dimensional materials have received considerable attention regarding their potential applications in nano-electronics. Here, we report top-gate nonvolatile memory field-effect transistors (FETs) with different layers of MoSe2 nanosheets channel gated by ferroelectric film. The conventional gate dielectric of FETs was replaced by a ferroelectric thin film that provides a ferroelectric polarization electric field, and therefore defined as an Fe-FET where the poly (vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) was used as the gate dielectric. Among the devices with MoSe2 channels of different thicknesses, the device with a single layer of MoSe2 exhibited a large hysteresis of electronic transport with an over 10(5) write/erase ratio, and displayed excellent retention and endurance performance. The possible mechanism of the device's good properties was qualitatively analyzed using band theory. Additionally, a comprehensive study comparing the memory properties of MoSe2 channels of different thicknesses is presented. Increasing the numbers of MoSe2 layers was found to cause a reduced memory window. However, MoSe2 thickness of 5 nm yielded a write/erase ratio of more than 10(3). The results indicate that, based on a Fe-FET structure, the combination of two-dimensional semiconductors and organic ferroelectric gate dielectrics shows good promise for future applications in nonvolatile ferroelectric memory.
引用
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页数:8
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