A compact V-band 2-bit reflection-type MEMS phase shifter

被引：17

作者：

Kim, HT ^{[1
]}

Park, JH ^{[1
]}

Yim, J ^{[1
]}

Kim, YK ^{[1
]}

Kwon, Y ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Elect Engn, Ctr Millimeter Wave Integrated Syst 3D, Seoul, South Korea

来源：

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS | 2002年 / 12卷 / 09期

关键词：

MEMS switch; reflection-type phase shifter;

D O I：

10.1109/LMWC.2002.803198

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Air-gap overlay CPW couplers and low-loss series metal-to-metal contact microelectromechanical system (MEMS) switches have been employed to reduce the loss of reflection-type MEMS phase shifters at V-band. Phase shift is obtained by changing the lengths of the open-ended stubs using series MEMS switches. A 2-bit (135degrees) reflection-type MEMS phase shifter showed an average insertion loss of 4 dB with return loss better than 11.7 dB from 50 to 70 GHz. The chip is very compact with a chip size as small as 1.5 mm x 2.1 mm.

引用

页码：324 / 326

页数：3

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