Waveguide-coupled AlGaAs/GaAs microcavity ring and disk resonators with high finesse and Z1.6-nm free spectral range

被引：202

作者：

Rafizadeh, D ^{[1
]}

Zhang, JP ^{[1
]}

Hagness, SC ^{[1
]}

Taflove, A ^{[1
]}

Stair, KA ^{[1
]}

Ho, ST ^{[1
]}

Tiberio, RC ^{[1
]}

机构：

[1] CORNELL UNIV, CORNELL NANOFABRICAT FACIL, ITHACA, NY 14853 USA

来源：

OPTICS LETTERS | 1997年 / 22卷 / 16期

关键词：

D O I：

10.1364/OL.22.001244

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-mu m-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-mu m-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-mu m-diameter ring and disk resonators to show the feasibility of such devices. (C) 1997 Optical Society of America.

引用

页码：1244 / 1246

页数：3

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