Investigation on nickel/alumina-nanoparticles co-deposition

被引:1
作者
Huang, Xinlong [1 ]
Xiong, Ying [1 ]
Liu, Longhua [1 ]
Tian, Yangchao [1 ]
Liu, Gang [1 ]
机构
[1] USTC, NSRL, Microfabricat Lab, Hefei 230029, Anhui, Peoples R China
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2009年 / 15卷 / 05期
关键词
COMPOSITE COATINGS; ELECTRODEPOSITION; FABRICATION;
D O I
10.1007/s00542-009-0790-9
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ni/Al2O3-nanoparticles composite microcomponents with thickness of 300 mu are fabricated for micromechanical workpieces by using a combination of UV-lithography and micro electroforming. An effective and low cost process for electroplating the composite microcomponents using a spraying assistance is developed in this paper to disperse the alumina nanoparticles uniformly. The dispersing state is simulated presumably by using hydrokinetics finite element analysis. The simulated results show that the mass of tiny laminar flows and whirlpools caused by spraying riptides would be helpful to prevent the nanoparticles from reuniting and maintain the suspended state of nanoparticles around the cathode surface. The experimental results show that the alumina nanoparticles are uniformly dispersed in the microcomponents during the co-depositing process with the spraying assistance. The spraying-deposition process not only improves the dispersing condition of alumina nanoparticles but also promotes them to be adsorbed and deposited uniformly onto the cathode surface. The micromechanical properties of the composite components are also tested. The data shows that the mechanical properties of the components are significantly improved compared with the pure nickel components.
引用
收藏
页码:723 / 729
页数:7
相关论文
共 15 条
[1]   PROTECTING TURBOMACHINERY FROM SELF-EXCITED ROTOR WHIRL [J].
ALFORD, JS .
JOURNAL OF ENGINEERING FOR POWER, 1965, 87 (04) :333-&
[2]   Fabrication of LIGA mold inserts [J].
Bacher, W ;
Bade, K ;
Matthis, B ;
Saumer, M ;
Schwarz, R .
MICROSYSTEM TECHNOLOGIES, 1998, 4 (03) :117-119
[3]   Low-cost HARMS process [J].
Bischofberger, R ;
Zimmermann, H ;
Staufert, G .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 61 (1-3) :392-399
[4]   Effect of surfactant on the electrodeposition and wear resistance of Ni-Al2O3 composite coatings [J].
Chen, Li ;
Wang, Liping ;
Zeng, Zhixiang ;
Zhang, Junyan .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2006, 434 (1-2) :319-325
[5]   Electroplating preparation of Ni-Al2O3 graded composite coatings using a rotating cathode [J].
Dong, YS ;
Lin, PH ;
Wang, H .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (11) :3633-3636
[6]   Preparation of nanostructured Ni/Al2O3 composite coatings in high magnetic field [J].
Feng, Qiuyuan ;
Li, Tingju ;
Zhang, Zhongtao ;
Zhang, Jian ;
Liu, Mei ;
Jin, Junze .
SURFACE & COATINGS TECHNOLOGY, 2007, 201 (14) :6247-6252
[7]   Transport limitations in electrodeposition for LIGA microdevice fabrication [J].
Griffiths, SK ;
Nilson, RH ;
Bradshaw, RW ;
Ting, A ;
Bonivert, WD ;
Hachman, JT ;
Hruby, JM .
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IV, 1998, 3511 :364-375
[8]   Study of hot embossing using nickel and Ni-PTFE LIGA Mold inserts [J].
Guo, Yuhua ;
Liu, Gang ;
Xiong, Ying ;
Wang, Jun ;
Huang, Xinlong ;
Tian, Yangchao .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (03) :589-597
[9]  
Hull D., 1981, INTRO COMPOSITE MAT, V1st
[10]   Electrodeposition Science and Technology in the Last Quarter of the Twentieth Century [J].
Landolt, D .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (03) :S9-S20