Adsorbed multilayer effects on the mechanical properties in nanometer indentation depth

被引:10
作者
Jeng, Yeau-Ren [1 ]
Tsai, Ping-Chi [1 ]
Liu, Yan-Hong [1 ]
机构
[1] Natl Chung Cheng Univ, Dept Mech Engn, Chiayi 621, Taiwan
关键词
Multilayers; Thin films; Mechanical properties; MOLECULAR-DYNAMICS SIMULATION; POLYMER MELTS; ATOMIC-SCALE; NANOINDENTATION; RHEOLOGY; FRICTION; NANOTRIBOLOGY; DEFORMATION; LUBRICATION; SILICON;
D O I
10.1016/j.materresbull.2009.06.005
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
u Nanoindentation is a powerful technique for determining the mechanical properties of a material at the nanometer scale. In this study, the changes induced in the mechanical properties of a thin film by the presence of adsorbed multilayers are examined by performing nanoindentation tests with ultra-low indentation depths. The current findings suggest that the results obtained for the mechanical properties of thin films under nanoindentation will be overestimated if the effects of the adsorbed multilayers on reducing elastic recovery between the indenter and the substrate are not taken into consideration. (C) 2009 Published by Elsevier Ltd.
引用
收藏
页码:1995 / 1999
页数:5
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