Enhanced signal-to-noise ratio in pristine, suspended carbon nanotube gas sensors

被引:37
作者
Chikkadi, Kiran [1 ]
Muoth, Matthias [1 ]
Liu, Wei [1 ]
Maiwald, Verena [1 ]
Hierold, Christofer [1 ]
机构
[1] ETH, CH-8092 Zurich, Switzerland
来源
SENSORS AND ACTUATORS B-CHEMICAL | 2014年 / 196卷
关键词
Carbon nanotube gas sensors; Hysteresis; Drift; Ultraclean; Low frequency noise; Signal-to-noise ratio; FIELD-EFFECT TRANSISTOR; 1/F NOISE; CONTACTS; DEVICES; WIRES;
D O I
10.1016/j.snb.2014.02.058
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We present hysteresis-free, suspended carbon nanotube gas sensors that have been fabricated with a dry transfer technique. By avoiding process contamination and oxide charge traps, we eliminate the long-term baseline drift associated with charge-trapping that is commonly observed in conventional substrate-bound gas sensors under constant bias conditions. Long-term noise measurements on the suspended devices show that the low-frequency flicker noise attributed to charge trapping is also strongly reduced compared to on-substrate devices. Correspondingly, the average signal-to-noise ratio improves by 9 times compared to the substrate-bound, top-down contacted carbon nanotube gas sensors on a SiO2 substrate. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:682 / 690
页数:9
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