共 50 条
[31]
Piezoelectric sensor-actuator control device
[J].
SENSORS, SYSTEMS AND NEXT-GENERATION SATELLITES V,
2001, 4540
:342-353
[35]
Precision Control of Magnetic Drive Actuator Used for Laser Cutting with Compensation of Zero Point of Displacement Sensor
[J].
ADVANCES IN MANUFACTURING TECHNOLOGY, PTS 1-4,
2012, 220-223
:978-+
[38]
AN INTERFEROMETRIC ANGULAR AND LINEAR DISPLACEMENT SENSOR
[J].
MEASUREMENT TECHNIQUES USSR,
1988, 31 (02)
:115-117