Influence of thickness and growth temperature on the optical and electrical properties of ZnO thin films

被引：52

作者：

Suchea, M. ^{[1
,2
,3
]}

Christoulakis, S. ^{[1
]}

Katharakis, M. ^{[1
,4
]}

Vidakis, N. ^{[5
]}

Koudoumas, E. ^{[1
,6
]}

机构：

[1] TEI Crete, Sch Appl Technol, Ctr Mat Technol & Laser, Iraklion 71004, Crete, Greece

[2] Fdn Res & Technol Hellas, Inst Elect Struct & Laser, Iraklion 71110, Crete, Greece

[3] Univ Crete, Dept Chem, Iraklion 71003, Crete, Greece

[4] TEI Crete, Dept Sci, Iraklion 71004, Crete, Greece

[5] TEI Crete, Dept Mech Engn, Iraklion 71004, Crete, Greece

[6] TEI Crete, Dept Elect Engn, Iraklion 71004, Crete, Greece

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 15期

关键词：

Zinc oxide; Pulsed laser deposition; Optical properties; Electrical properties; PULSED-LASER DEPOSITION; ABLATION; PLD;

D O I：

10.1016/j.tsf.2008.11.143

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Zinc oxide transparent conductive thin films were prepared using the pulsed laser deposition technique onto Corning glass substrates and the dependences of their optical and electrical properties on the thickness and the growth temperature were investigated. As shown, the films present 90% average transmittance, their energy gap position depending on the film thickness and the growth temperature. An additional absorption band was also observed near 3.44 eV, the position of its maximum also depending on the growth parameters. Finally, the electrical properties of the films were found to be affected mainly by the growth temperature and less by the thickness. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：4303 / 4306

页数：4

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