Ultrafast processes for bulk modification of transparent materials

被引:399
作者
Itoh, Kazuyoshi
Watanabe, Wataru
Nolte, Stefan
Schaffer, Chris B.
机构
关键词
fluidics; laser; machining; optical;
D O I
10.1557/mrs2006.159
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
When a femtosecond laser pulse is focused inside a transparent material, the optical intensity in the focal volume can become high enough to induce permanent structural modifications such as a refractive index change or the formation of a small vacancy. Thus, one can micromachine structures inside the bulk of a transparent material in three dimensions. We review the mechanisms of and techniques for bulk modification of transparent materials using femtosecond laser pulses and discuss the fabrication of photonic and other structures in transparent materials, including waveguides, couplers, gratings, diffractive lenses, optical data storage, and microfluidic channels.
引用
收藏
页码:620 / 625
页数:6
相关论文
共 80 条
[1]   Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses [J].
Ams, M ;
Marshall, GD ;
Spence, DJ ;
Withford, MJ .
OPTICS EXPRESS, 2005, 13 (15) :5676-5681
[2]   Femtosecond-irradiation-induced refractive-index changes and channel waveguiding in bulk Ti3+:Sapphire [J].
Apostolopoulos, V ;
Laversenne, L ;
Colomb, T ;
Depeursinge, C ;
Salathé, RP ;
Pollnau, M ;
Osellame, R ;
Cerullo, G ;
Laporta, P .
APPLIED PHYSICS LETTERS, 2004, 85 (07) :1122-1124
[3]   Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching [J].
Bellouard, Y ;
Said, A ;
Dugan, M ;
Bado, P .
OPTICS EXPRESS, 2004, 12 (10) :2120-2129
[4]   Femtosecond laser-induced refractive index modification in multicomponent glasses [J].
Bhardwaj, VR ;
Simova, E ;
Corkum, PB ;
Rayner, DM ;
Hnatovsky, C ;
Taylor, RS ;
Schreder, B ;
Kluge, M ;
Zimmer, J .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (08)
[5]   Densification of fused silica under 193-nm excitation [J].
Borrelli, NF ;
Smith, C ;
Allan, DC ;
Seward, TP .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1997, 14 (07) :1606-1615
[6]   Form birefringence and negative index change created by femtosecond direct writing in transparent materials [J].
Bricchi, E ;
Klappauf, BG ;
Kazansky, PG .
OPTICS LETTERS, 2004, 29 (01) :119-121
[7]  
Bruckner R., 1971, Journal of Non-Crystalline Solids, V5, P177, DOI 10.1016/0022-3093(71)90032-9
[8]  
Bruckner R., 1970, Journal of Non-Crystalline Solids, V5, P123, DOI 10.1016/0022-3093(70)90190-0
[9]   Femtosecond micromachining of symmetric waveguides at 1.5 μm by astigmatic beam focusing [J].
Cerullo, G ;
Osellame, R ;
Taccheo, S ;
Marangoni, M ;
Polli, D ;
Ramponi, R ;
Laporta, P ;
De Silvestri, S .
OPTICS LETTERS, 2002, 27 (21) :1938-1940
[10]   Waveguide fabrication in phosphate glasses using femtosecond laser pulses [J].
Chan, JW ;
Huser, TR ;
Risbud, SH ;
Hayden, JS ;
Krol, DM .
APPLIED PHYSICS LETTERS, 2003, 82 (15) :2371-2373