Pulverisation method for active layer coating on microsystems

被引：10
|
作者：
Jiménez, I
Cirera, A
Cornet, A
Morante, JR
Gracia, I
Cané, C
机构：
[1] Univ Barcelona, Fac Fis, Dept Elect, E-08028 Barcelona, Spain
[2] Ctr Nacl Microelect, Bellaterra, Spain
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2002年 / 84卷 / 01期
关键词：
micromachined gas sensors; pulverisation coating; indium oxide;
D O I：
10.1016/S0925-4005(01)01078-4
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
By means of the pulverisation of a solution of indium oxide nanoparticles, sensitive layers for gas detection were deposited in silicon micromachined sensors in order to define layers with a thickness range covering thin and thick technologies. Influence of electrodes geometry, interdigited and parallel, was studied and better sensor response was found in interdigited sensors. Continuously heated and temperature-pulsed working modes were also compared, showing that pulsed mode improve the sensor response. As an example, sensor response to low concentrations of NO, in humid air has been studied and results confirmed the viability of this technique to obtain micromachined gas sensors. B.V. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码：78 / 82
页数：5
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