Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering

被引：30

作者：

Ganesan, R. ^{[1
]}

McCulloch, D. G. ^{[2
]}

Marks, N. A. ^{[3
,4
]}

Tucker, M. D. ^{[4
]}

Partridge, J. G. ^{[2
]}

Bilek, M. M. M. ^{[1
]}

McKenzie, D. R. ^{[1
]}

机构：

[1] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia

[2] RMIT Univ, Sch Appl Sci, Melbourne, Vic 3001, Australia

[3] Curtin Univ, Curtin Inst Computat, Nanochem Res Inst, Perth, WA 6102, Australia

[4] Curtin Univ, Dept Phys & Astron, Perth, WA 6102, Australia

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2015年 / 48卷 / 44期

基金：

澳大利亚研究理事会;

关键词：

tetrahedral amorphous carbon; HiPIMS sputtering; arcs; EELS; Raman; SP(3) FRACTION; RAMAN-SPECTRA; DLC FILMS; DEPOSITION; VACUUM; ENERGY; ARC;

D O I：

10.1088/0022-3727/48/44/442001

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Tetrahedral amorphous carbon films with an sp3 content of 80% have been produced by high power impulse magnetron sputtering (HiPIMS) operating in a mixed sputtering/arc mode. In this mode, short-lived cathode spots form in the magnetic racetrack and produce large numbers of carbon ions. The spots move rapidly, inhibiting the formation of macroparticles. An argon pressure below 2.5 mTorr was critical for obtaining films with high sp3 content, high stress, large Tauc gap and symmetrical Raman spectra, and all four quantities were strongly correlated.

引用

页数：5

共 35 条

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