Collisionless electron heating in inductively coupled discharges

被引:25
作者
Shaing, KC
Aydemir, AY
机构
[1] Institute for Fusion Studies, University of Texas at Austin, Austin
关键词
D O I
10.1063/1.872455
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A kinetic theory of collisionless electron heating is developed for inductively coupled discharges with a finite length L. The novel effect associated with the finite-length system is the resonance between the bounce motion of the electrons and the wave frequency, leading to enhanced heating. The theory is in agreement with results of electromagnetic particle simulations. (C) 1997 American Institute of Physics.
引用
收藏
页码:3163 / 3166
页数:4
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