Calculation of the optical constants of a thin layer upon a transparent substrate from the reflection spectrum using a genetic algorithm

被引:33
作者
Güngör, T
Saka, B
机构
[1] Hacettepe Univ, Dept Engn Phys, TR-06532 Ankara, Turkey
[2] Hacettepe Univ, Dept Elect & Elect Engn, TR-06532 Ankara, Turkey
关键词
genetic algorithm; reflectance; refractive index dispersion;
D O I
10.1016/j.tsf.2004.04.040
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A genetic algorithm (GA) is proposed for the calculation of the optical constants of a thin layer upon a thick finite transparent substrate only from the reflection spectrum into the visible and near infrared regions. A particular interest of this method is that it finds the roots fast and very accurately using global minimum. The obtained results using the GA method give spectral dependence of refractive index and film thickness for two reference samples with an error of 0.1%. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:319 / 325
页数:7
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