Use of spectroscopic ellipsometry to study Zr/Ti films on Al

被引：38

作者：

Laha, P ^{[1
]}

Schram, T ^{[1
]}

Terryn, H ^{[1
]}

机构：

[1] Free Univ Brussels, Dept Met Electrochem & Mat Sci, B-1050 Brussels, Belgium

来源：

SURFACE AND INTERFACE ANALYSIS | 2002年 / 34卷 / 01期

关键词：

spectroscopic ellipsometry; conversion coating; aluminium; Zr/Ti;

D O I：

10.1002/sia.1386

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Spectroscopic ellipsometry in the spectral range between the near-ultraviolet and the near-infrared (250-1700 nm) (SE) and the mid-infrared (2-23 mum) (IR-SE) have been used for the characterization of various thin coatings on aluminium. Both SE and IR-SE provide information concerning the morphological features of the coating, but owing to the presence of characteristic absorptions IR-SE also reveals the chemical composition. This paper discusses the application of the developed optical models for the characterization of the more complex Zr/Ti-based passivation coatings. The results obtained indicate that these coatings consist of a complex hydrated Zr/Ti/Al oxyfluoride. Copyright (C) 2002 John Wiley Sons, Ltd.

引用

页码：677 / 680

页数：4

共 15 条

[1] VARIABLE WAVELENGTH, VARIABLE ANGLE ELLIPSOMETRY INCLUDING A SENSITIVITIES CORRELATION TEST [J].

BUABBUD, GH ;

BASHARA, NM ;

WOOLLAM, JA .

THIN SOLID FILMS, 1986, 138 (01) :27-41

[2]

DELAET J, 1992, APPL PHYS A-MATER, V54, P72, DOI 10.1007/BF00348134

[3] Influence of interface roughness on silicon oxide thickness measured by ellipsometry [J].

Fang, SJ ;

Chen, W ;

Yamanaka, T ;

Helms, CR .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1997, 144 (08) :L231-L233

[4] QUANTITATIVE INFRARED-SPECTROSCOPY OF THIN SOLID AND LIQUID-FILMS UNDER ATTENUATED TOTAL-REFLECTION CONDITIONS [J].

GROSSE, P ;

OFFERMANN, V .

VIBRATIONAL SPECTROSCOPY, 1995, 8 (02) :121-133

[5] DATA-ANALYSIS FOR SPECTROSCOPIC ELLIPSOMETRY [J].

JELLISON, GE .

THIN SOLID FILMS, 1993, 234 (1-2) :416-422

[6]

Newhard Jr N.J., 1979, P CORR CONTR COAT, P225

[7] KRAMERS-KRONIG CALCULATION OF THE GRAZING ANGLE REFLECTION SPECTRUM OF BARRIER OXIDE LAYER ON ALUMINUM [J].

NISHIKIDA, K ;

HANNAH, RW .

APPLIED SPECTROSCOPY, 1992, 46 (06) :999-1001

[8]

Roseler A., 1990, Infrared Spectroscopic Ellipsometry

[9] Nondestructive optical characterization of chemical conversion coatings on aluminum [J].

Schram, T ;

De Laet, J ;

Terryn, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (08) :2733-2739

[10] Non-destructive optical characterisation of chromium conversion layers on aluminium [J].

Schram, T ;

De Laet, J ;

Terryn, H .

THIN SOLID FILMS, 1998, 313 :727-731

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