Application of flicker-noise spectroscopy in studies of porous silicon growth and properties

被引:8
|
作者
Parkhutik, V
Budnikov, EY
Timashev, SF
机构
[1] Univ Politecn Valencia, Valencia 46071, Spain
[2] Karpov Inst Phys Chem, Moscow, Russia
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2000年 / 69卷
关键词
porous silicon; kinetics of growth; deterministic chaos; flicker-noise;
D O I
10.1016/S0921-5107(99)00279-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This work presents the results of studying the formation of porous silicon (PS) using flicker-noise spectroscopy (FNS). This is a new phenomenological method, which allows analysis of the evolution of non-linear dissipative systems. It is based on the ideas of deterministic chaos and allows study of the dynamic processes in complex macro- and micro-systems. FNS approach allows a fingerprint of the state of a dynamic system to be obtained and detection of changes of its properties due to evolution in time and/or space. Application of FNS to the analysis of the kinetics of growth of PS shows interesting possibilities. Thus, the cases of n-Si and p-Si demonstrate drastic differences of the characteristics of noise that in its turn shows the possibility of different mechanisms of the PS formation, 'Passport data' of the PS growth process are very sensitive to the current density, and even to the stage of the PS formation, that makes the method quite appropriate in the analysis of the mechanism of the pore growth. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:53 / 58
页数:6
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