Fabrication and characterization of Sb/B4C multilayer mirrors for soft X-rays

被引：11

作者：

Kopylets, I. A. ^{[1
]}

Kondratenko, V. V. ^{[1
]}

Zubarev, E. N. ^{[1
]}

Voronov, D. L. ^{[2
]}

Gullikson, E. M. ^{[2
]}

Vishnyakov, E. A. ^{[3
,4
]}

Ragozin, E. N. ^{[3
,4
]}

机构：

[1] Natl Tech Univ, Kharkiv Polytech Inst, UA-61002 Kharkov, Ukraine

[2] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA

[3] State Univ, Moscow Inst Phys & Technol, Dolgoprudnyi 141700, Moscow Region, Russia

[4] Russian Acad Sci, PN Lebedev Phys Inst, Moscow 119991, Russia

来源：

APPLIED SURFACE SCIENCE | 2014年 / 307卷

关键词：

layer; Antimony Boron carbide; X-ray diffraction; Amorphous Magnetron sputtering;

D O I：

10.1016/j.apsusc.2014.04.038

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Structure characterization of Sb/B4C multilayers for soft X-ray optics with a layers thickness from 0.5 nm to 7 nm is reported for the first time. Sb/B4C coatings were manufactured via magnetron sputtering. Amorphous and crystalline phases of the layers and the multilayer structure parameters were characterized with the X-ray diffraction data and the TEM data. The Sb/B4C multilayers demonstrated long term stability of their parameters and performances. The reached value of the reflectance of the Sb/B4C multilayers is 19-28% measured at the near-normal incidence in the wavelength range of 6.64-8.5 nm. The influence of reduced Sb density on the reflectivity is discussed. C) 2014 Elsevier B.V. All rights reserved.

引用

页码：360 / 364

页数：5

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