Sol-gel derived lead zirconate titanate: Processing, micrometer and nanometer scale patterning and characterization

被引：4

作者：

Khan, Sajid Ullah ^{[1
]}

Mateen, Abdul ^{[1
]}

Qazi, Ibrahim ^{[1
]}

机构：

[1] Inst Space Technol, Fac Mat Sci & Engn, Islamabad 44000, Pakistan

来源：

CERAMICS INTERNATIONAL | 2016年 / 42卷 / 01期

关键词：

Soft-lithography; MIMIC; mu TM; Ferroelectric materials; Oxides; PZT THIN-FILMS; MICROSTRUCTURE; CRYSTALLIZATION; ORIENTATION;

D O I：

10.1016/j.ceramint.2015.08.077

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

To produce good quality films and patterns with high fidelity, the fabrication of PZT by sol-gel process was investigated, and various processing steps were studied. Sol-gel based PZT solutions were prepared and converted into thin films and patterns with spin coating and soft lithographic techniques, respectively. Structural and compositional analysis of the films and patterns was performed with XRD, and surface and topography were studied with HRSEM and AFM. Electrode deposition on the thin films and patterns were done with FIB, PLD and sputtering. The ferroelectric and dielectric properties of the film derived were also investigated. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

引用

页码：185 / 193

页数：9

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