Multi-walled carbon nanotube-based gas sensors for NH3 detection

被引：133
|
作者：
Wang, SG [1 ]
Zhang, Q
Yang, DJ
Sellin, PJ
Zhong, GF
机构：
[1] Univ Surrey, Dept Phys, Sch Elect & Phys Sci, Guildford GU2 7XH, Surrey, England
[2] Nanyang Technol Univ, Clean Room & Characterizat Lab, Ctr Microelect, Sch Elect & Elect Engn, Singapore 639798, Singapore
[3] Waseda Univ, Ctr Excellence, Shinjuku Ku, Tokyo 1620041, Japan
来源：
DIAMOND AND RELATED MATERIALS | 2004年 / 13卷 / 4-8期
关键词：
nanotubes; sensors; electrical conductivity; adsorption; chemical vapor deposition; ammonia (NH3);
D O I：
10.1016/j.diamond.2003.11.070
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Multi-walled carbon nanotube (MWNT) based gas sensors for detecting gaseous molecules of ammonia (NH3) were developed. MWNTs were prepared using microwave plasma-enhanced chemical vapor deposition. The gas sensors, in which the nanotubes laid under the electrodes, were fabricated using electron-beam lithography and lift-off techniques. It is found that the conductance of MWNTs decreases when the sensors successively exposed to NH3 gas at room temperature of 25degreesC. The MWNT-based sensors are sensitive to NH3 gas. This suggests that the MWNTs could be a good candidate material for NH3 detection at room temperature. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：1327 / 1332
页数：6
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