A Comment on the Computer Simulation Program SRIM

被引：4
|
作者：
Shulga, V. I. [1 ]
机构：
[1] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia
来源：
JOURNAL OF SURFACE INVESTIGATION | 2019年 / 13卷 / 03期
关键词：
ion bombardment; sputtering; sputtering yield; amorphous target; computer simulation; program SRIM; SPUTTERING YIELDS; ENERGY; SOLIDS;
D O I：
10.1134/S1027451019030339
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The computer simulation program SRIM, unlike other well-known programs (MARLOWE, TRIM.SP, etc.), predicts non-zero values of the sputtering yield in the case of glancing ion bombardment of smooth amorphous targets. To understand the reason for this and other differences, simulation of the sputtering of a germanium target bombarded with 0.1-10-keV ions is carried out using the OKSANA program. It is shown that SRIM insufficiently correctly simulates the initial stage of the sputtering process.
引用
收藏
页码：562 / 565
页数：4
相关论文
共 50 条
  • [21] VARIABLE-STARS COMPUTER-PROGRAM LIBRARY - COMMENT
    BANKS, T
    BUDDING, E
    OBSERVATORY, 1992, 112 (1106): : 16 - 17
  • [22] COMPUTER-PROGRAM FOR DESIGNING DIGITAL ELLIPTIC FILTERS - COMMENT
    THOMAS, CW
    IEEE TRANSACTIONS ON ACOUSTICS SPEECH AND SIGNAL PROCESSING, 1978, 26 (05): : 480 - 480
  • [23] Simulation of ion beam sputtering with OKSANA and SRIM: A comparative study
    Shulga, V. I.
    VACUUM, 2024, 230
  • [24] ANALYSIS AND SIMULATION OF STRUCTURAL REACTION INJECTION-MOLDING (SRIM)
    AOYAGI, H
    UENOYAMA, M
    GUCERI, SI
    INTERNATIONAL POLYMER PROCESSING, 1992, 7 (01) : 71 - 83
  • [25] A computer program for scanning transmission ion microscopy simulation
    Wu, R
    Shen, H
    Mi, Y
    Sun, MD
    Yang, MJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 231 : 149 - 155
  • [26] AQUASIM: Computer program for the identification and simulation of aquatic systems
    Reichert, P
    Ruchti, J
    Simon, W
    HYDROINFORMATICS '96, VOLS 1 AND 2, 1996, : 835 - 837
  • [27] THERMO": COMPUTER PROGRAM FOR SIMULATION OF SURFACE PULSE HEATING
    S. Fedosov Samara State Technical University
    Acta Metallurgica Sinica(English Letters), 2000, (02) : 557 - 560
  • [28] COMPUTER-PROGRAM FOR EXPERIMENTAL-DESIGN SIMULATION
    WOODINGS, TL
    MADSEN, BW
    COMPUTERS AND BIOMEDICAL RESEARCH, 1978, 11 (06): : 581 - 594
  • [29] CRACK SIMULATION COMPUTER PROGRAM FOR PLATE STRUCTURE.
    Ushirokawa, Osama
    IHI Engineering Review (English Edition), 1980, 13 (03): : 21 - 26
  • [30] A COMPUTER-PROGRAM FOR THE SIMULATION OF THERMOIONIC ELECTRON GUNS
    LULLI, G
    JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1982, 7 (03): : A53 - A53
12345