A Comment on the Computer Simulation Program SRIM

被引：4

作者：

Shulga, V. I. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION | 2019年 / 13卷 / 03期

关键词：

ion bombardment; sputtering; sputtering yield; amorphous target; computer simulation; program SRIM; SPUTTERING YIELDS; ENERGY; SOLIDS;

D O I：

10.1134/S1027451019030339

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The computer simulation program SRIM, unlike other well-known programs (MARLOWE, TRIM.SP, etc.), predicts non-zero values of the sputtering yield in the case of glancing ion bombardment of smooth amorphous targets. To understand the reason for this and other differences, simulation of the sputtering of a germanium target bombarded with 0.1-10-keV ions is carried out using the OKSANA program. It is shown that SRIM insufficiently correctly simulates the initial stage of the sputtering process.

引用

页码：562 / 565

页数：4

共 50 条

[11] COMPUTER-SIMULATION FOR PROGRAM-EVALUATION
TROCHIM, WMK
DAVIS, JE
EVALUATION REVIEW, 1986, 10 (05) : 609 - 634
[12] Computer simulation of channeling spectra with the CASSIS program
Kling, A
Soares, JC
Da Silva, MF
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1997, 141 (1-4): : 53 - 61
[13] Computer program for equilibrium calculation and diffusion simulation
Jiang, Chao, 2000, (10):
[14] The development of the computer simulation program for the rotomolding process
Xu, L
Crawford, RJ
ANTEC'97 - PLASTICS SAVING PLANET EARTH, CONFERENCE PROCEEDINGS, VOLS 1 - 3, 1997, : 3205 - 3209
[15] A COMPUTER-PROGRAM FOR THE SIMULATION OF LANDFORM EROSION
CRAIG, RG
COMPUTERS & GEOSCIENCES, 1980, 6 (02) : 111 - 142
[16] Computer program for equilibrium calculation and diffusion simulation
Jiang, C
Jin, ZP
TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, 2000, 10 (02) : 156 - 161
[17] FACSIMILE - COMPUTER-PROGRAM FOR SIMULATION AND OPTIMIZATION
CURTIS, AR
BIOCHEMICAL SOCIETY TRANSACTIONS, 1976, 4 (02) : 364 - 371
[18] Computer program for equilibrium calculation and diffusion simulation
蒋超
金展鹏
TransactionsofNonferrousMetalsSocietyofChina, 2000, (02) : 156 - 161
[19] SRIM Simulation of Carbon Ions Interaction with Ni Nanotubes
Kaniukov, E.
Kutuzau, M.
Bundyukova, V
Yakimchuk, D.
Kozlovskiy, A.
Borgekov, D.
Zdorovets, M.
Shlimas, D.
Shumskaya, A.
MATERIALS TODAY-PROCEEDINGS, 2019, 7 : 872 - 877
[20] COMMENT ON ANALOG-COMPUTER SIMULATION IN PLASMA PHYSICS
COOK, DM
AMERICAN JOURNAL OF PHYSICS, 1972, 40 (01) : 210 - &

← 1 2 3 4 5 →