A Comment on the Computer Simulation Program SRIM

被引：4
|
作者：
Shulga, V. I. [1 ]
机构：
[1] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia
来源：
JOURNAL OF SURFACE INVESTIGATION | 2019年 / 13卷 / 03期
关键词：
ion bombardment; sputtering; sputtering yield; amorphous target; computer simulation; program SRIM; SPUTTERING YIELDS; ENERGY; SOLIDS;
D O I：
10.1134/S1027451019030339
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The computer simulation program SRIM, unlike other well-known programs (MARLOWE, TRIM.SP, etc.), predicts non-zero values of the sputtering yield in the case of glancing ion bombardment of smooth amorphous targets. To understand the reason for this and other differences, simulation of the sputtering of a germanium target bombarded with 0.1-10-keV ions is carried out using the OKSANA program. It is shown that SRIM insufficiently correctly simulates the initial stage of the sputtering process.
引用
收藏
页码：562 / 565
页数：4
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