Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics

被引：63

作者：

Morlens, Anne-Sophie

Gautier, Julien

Rey, Gilles

Zeitoun, Philippe

Caumes, Jean-Pascal

Kos-Rosset, Marylene

Merdji, Hamed

Kazamias, Sophie

Casson, Kevin

Fajardo, Marta

机构：

[1] Ecole Polytech, CNRS,UMR 7639, Ecole Natl Super Tech Avancees, Lab Opt Appl, F-91761 Palaiseau, France

[2] Ctr Etud Saclay, CEA, Serv Photons Atomes & Mol, F-91191 Gif Sur Yvette, France

[3] Univ Paris Sud, Lab Interact Rayonnement Avec Mat X, F-91405 Orsay, France

[4] Inst Super Tecn, Ctr Fis Plasmas, Lab Associado Ctr Fusao Nuc, P-1049001 Lisbon, Portugal

来源：

OPTICS LETTERS | 2006年 / 31卷 / 21期

关键词：

Holography;

D O I：

10.1364/OL.31.003095

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 mu m wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally. (c) 2006 Optical Society of America.

引用

页码：3095 / 3097

页数：3

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