Ultraviolet Detectors Based on Ultraviolet-Ozone Modified Hydrogenated Diamond Surfaces

被引：5

作者：

Alvarez, Jose ^{[1
,2
,3
,4
]}

Liao, Meiyong ^{[5
]}

Kleider, Jean-Paul ^{[1
,2
,3
,4
]}

Koide, Yasuo ^{[5
]}

Imura, Masataka ^{[6
]}

机构：

[1] CNRS, Lab Genie Elect Paris, UMR8507, F-91192 Gif Sur Yvette, France

[2] SUPELEC, F-91192 Gif Sur Yvette, France

[3] Univ Paris 06, UPMC, F-91192 Gif Sur Yvette, France

[4] Univ Paris Sud, F-91192 Gif Sur Yvette, France

[5] Natl Inst Mat Sci, Sensor Mat Ctr, Tsukuba, Ibaraki 3050044, Japan

[6] Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton, Tsukuba, Ibaraki 3050044, Japan

来源：

APPLIED PHYSICS EXPRESS | 2009年 / 2卷 / 06期

关键词：

CONDUCTIVITY;

D O I：

10.1143/APEX.2.065501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Photodetectors based on interdigitated fingers have been fabricated on hydrogen terminated diamond surfaces. These devices show weak photocurrent-to-dark current ratio (PDR similar to 10(-2)) and persistent photoconductivity making them inappropriate for ultraviolet (UV) detection applications despite high deep UV photocurrent (similar to 10(-4) A) and a spectral discrimination ratio (210/630 nm) of 10(5). However, an original approach combining the previous hydrogen terminated diamond surface with subsequent controlled UV-ozone post-treatments has allowed to respectively enhance the PDR and the discrimination ratio by more than 7 and 2 orders of magnitude while keeping in the same time a high value of deep UV photocurrent (10(-7)-10(-8) A). (c) 2009 The Japan Society of Applied Physics

引用

页数：3

共 19 条

[1] ELECTRICAL-PROPERTIES OF HYDROGENATED DIAMOND [J].