Room temperature operating InAsSb-based photovoltaic infrared sensors grown by metalorganic vapor phase epitaxy

被引:6
作者
Hasegawa, Ryosuke [1 ]
Yoshikawa, Akira [1 ]
Morishita, Tomohiro [1 ]
Moriyasu, Yoshitaka [1 ]
Nagase, Kazuhiro [1 ]
Kuze, Naohiro [1 ]
机构
[1] Asahi Kasei Corp, UVC Project, 2-1 Samejima, Fuji, Shizuoka 4168501, Japan
关键词
Characterization; Metalorganic vapor phase epitaxy; Antimonides; Semiconducting indium compounds; Infrared devices; INSB; GAAS;
D O I
10.1016/j.jcrysgro.2016.12.002
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have developed InAsxSb1-x-based photovoltaic infrared sensors (PVS) for room temperature operation by metalorganic vapor phase epitaxy (MOVPE). To obtain high performance, we improved the crystallinity of the InAs0.12Sb0.88 absorber layer and utilized a Ga(0.33)Ino(0.67)Sb electron barrier layer. An investigation of InAs0.12Sb0.88 growth conditions using a high-quality InSb buffer layer showed that we were able to obtain the smallest full-width at half-maximum (FWHM) of the X-ray diffraction omega rocking curve, 560 arcsec, for a growth temperature of 520 degrees C for a 1 gm thick layer. Moreover, we successfully grew a Ga0.33In0.67Sb barrier layer coherently on an InAs0.12Sb0.88 absorber layer, which is the first report of GayIn1-ySb growth on Sb-rich InAsxSb1-x. An InAsxSb1-x PVS with a responsivity at wavelengths of 8-12 gm was obtained, and estimated detectivity peak at room temperature was approximately 7x10(7) cm Hz112 W-1, which is 1.3 times higher than without a Ga0.33In0.67Sb electron barrier. These results demonstrate that our InAs Sbi, PVS is a promising device for the 8-12 mu m wavelength range at room temperature.
引用
收藏
页码:211 / 214
页数:4
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