RESIDUAL VIBRATIONS OF ELECTROSTATIC MICRO-ACTUATORS WITH NOVEL SHAPED CANTILEVERS

被引：0

作者：

Hsu, Ming-Hung ^{[1
]}

机构：

[1] Natl Penghu Univ, Dept Elect Engn, Penghu, Taiwan

来源：

JOURNAL OF MARINE SCIENCE AND TECHNOLOGY-TAIWAN | 2009年 / 17卷 / 02期

关键词：

Wilson-theta method; differential quadrature method; electrostatic micro-actuator; microelectromechanical system; nonlinear analysis; Kelvin-Voigt damping; novel shaped cantilever; DIFFERENTIAL QUADRATURE METHOD; STATIC ANALYSIS; BOUNDARY-CONDITIONS; PLATES; DEFORMATION; BEAMS;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper subjects electrostatic curved electrode actuators with novel shaped cantilevers to nonlinear dynamic analysis using the differential quadrature method. Numerical results are compared with experimental results to assess the efficiency and systematic procedure of this novel approach for nonlinear differential equations. The pull-in voltages computed for different structures correlate well with published data. Several characteristics of different combinations of shaped cantilevers and curved electrodes are also examined in this paper. Dynamic responses of actuators with novel shapes with several pull-in voltages are determined. The transitional responses for the derived systems are calculated using the Wilson-theta method.

引用

页码：88 / 96

页数：9

共 36 条

[1] DIFFERENTIAL QUADRATURE AND LONG-TERM INTEGRATION [J].