Structural and Conductivity Changes of Aluminum-doped Zinc Oxide Films by Spin Coating Technique

被引：0

作者：

Sandan, Mohd Zainizan ^{[1
]}

Mohamad, Zaharah ^{[1
]}

Ani, Norhidayah Che ^{[1
]}

Tawil, Siti Nooraya Mohd ^{[2
]}

机构：

[1] Univ Hussein Onn Malaysia, Microelect & Nanotechnol Ctr, Batupahat 86400, Johor, Malaysia

[2] Univ Malaysia Kern Sungai Besi, Dept Elect & Elect Engn, Kuala Lumpur 57000, Malaysia

来源：

NANOSCIENCE, NANOTECHNOLOGY AND NANOENGINEERING | 2014年 / 832卷

关键词：

Sol-gel; Zinc oxide (ZnO); Structural property; Conductivity; Nanostructures;

D O I：

10.4028/www.scientific.net/AMR.832.838

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Nanostructured zinc oxide (ZnO) thin films can be obtained by spin coating deposition technique. In this work, the effects of aluminum (Al) doping on the nanostructured ZnO films were investigated. The structural changes of ZnO films doped with Al ranging from 1 to 6 at.% were observed using a field emission scanning electron microscope (FESEM) and an x-ray diffractometer (XRD). The conductivity changes were obtained using a current-voltage (I-V) measurement system. In order to tailor the optical properties of Al-doped ZnO film for optoelectronic applications, its transparency and band gap were obtained using an ultra violet visible (UV-Vis) spectroscopy. The details explanation on the mechanism of ZnO structural and conductivity changes will be discussed detail in this paper.

引用

页码：838 / +

页数：2

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