Resolution limits of extrinsic Fabry-Perot interferometric displacement sensors utilizing wavelength scanning interrogation

被引：36

作者：

Ushakov, Nikolai ^{[1
]}

Liokumovich, Leonid ^{[1
]}

机构：

[1] St Petersburg State Polytech Univ, Dept Radiophys, St Petersburg 195251, Russia

来源：

APPLIED OPTICS | 2014年 / 53卷 / 23期

关键词：

SIGNAL-PROCESSING ALGORITHM; FREQUENCY; LASER;

D O I：

10.1364/AO.53.005092

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The factors limiting the resolution of displacement sensors based on the extrinsic Fabry-Perot interferometer were studied. An analytical model giving the dependency of extrinsic Fabry-Perot interferometric (EFPI) resolution on the parameters of an optical setup and a sensor interrogator was developed. The proposed model enables one to either estimate the limit of possible resolution achievable with a given setup, or derive the requirements for optical elements and/or a sensor interrogator necessary for attaining the desired sensor resolution. An experiment supporting the analytical derivations was performed, demonstrating a large dynamic measurement range (with cavity length from tens of microns to 5 mm), a high baseline resolution (from 14 pm), and good agreement with the model. (C) 2014 Optical Society of America

引用

页码：5092 / 5099

页数：8

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